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The development of a pressure sensor using a technique for patterning silver nanowires on 3-dimensional curved PDMS membranes
Journal of Micromechanics and Microengineering ( IF 2.4 ) Pub Date : 2020-08-03 , DOI: 10.1088/1361-6439/aba226
Rick Helgason , Angelica Campigotto , Yongjun Lai

The development of flexible electronic devices has primarily been focused on the production of flat 2-dimensional sensors and has lacked the ability to manufacture devices with complicated 3-dimensional geometry. A mold-based method for manufacturing devices with 3-dimensional geometry that is cost-effective and repeatable is presented herein. This technique is demonstrated by the fabrication of a novel pressure sensor using a 3-dimensional PDMS membrane patterned with a resistive silver nanowire network. The specific geometry of the sensor was chosen to provide a uniform strain distribution along the silver nanowire network. The sensor has a linear response to pressure, a gauge factor of 4–29, and behaves well under repeated cyclical testing. A flat sensor with a 2-dimensional membrane was also manufactured for comparison to the 3-dimensional sensor. It was observed that the flat membrane has a higher gauge factor but has a non-linear response to pressure.

中文翻译:

使用在3维弯曲PDMS膜上构图银纳米线的技术开发压力传感器

柔性电子设备的开发主要集中在平面二维传感器的生产上,并且缺乏制造具有复杂三维几何形状的设备的能力。本文提出了一种具有成本效益且可重复的制造具有三维几何形状的装置的基于模具的方法。通过使用新型3D PDMS膜和电阻银纳米线网络构图,可以制造新颖的压力传感器,从而证明了该技术。选择传感器的特定几何形状以沿银纳米线网络提供均匀的应变分布。传感器对压力具有线性响应,表压系数为4–29,并且在反复循环测试中表现良好。还制造了具有二维膜的平面传感器,以与三维传感器进行比较。观察到,平膜具有更高的表压系数,但是对压力具有非线性响应。
更新日期:2020-08-04
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