Residual stress plays an important role in the properties and performance of coatings, such as coating–substrate adhesion. With in situ residual stress measurements, further insight into the coating formation process can also be obtained. Substrate curvature deflection measurements during the aerosol deposition of BaTiO3 were employed to calculate the coating’s residual stress via the Stoney formula and compared to x-ray diffraction measurements. Analysis of the substrate deflection behavior during coating application is discussed and compared to related spray processes.

中文翻译：

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气溶胶沉积法沉积 BaTiO3 薄膜的原位基板曲率测量

残余应力在涂层的性质和性能中起着重要作用，例如涂层与基材的附着力。通过原位残余应力测量，还可以获得对涂层形成过程的进一步了解。BaTiO3 气溶胶沉积过程中的基材曲率挠度测量用于通过斯托尼公式计算涂层的残余应力，并与 X 射线衍射测量进行比较。讨论了涂层应用过程中基材挠曲行为的分析，并与相关喷涂工艺进行了比较。