In previous decades, investigation of superconductors was aimed either at finding materials with higher critical temperatures or at discovering nontypical superconducting behavior. Here, we present the cupric (CuO) thin films, which were synthesized by atomic layer deposition by using a metal-organic precursor, copper (II)-bis-(-dimethylamino-2-propoxide), and ozone as an oxidizer. The deposition process was optimized by employing a quartz crystal monitoring, and the contact between the deposited films and planar and three-dimensional SiO₂/Si substrates was examined by scanning electron microscopy with a focused ion beam module. Phase and elemental composition were analyzed by X-ray diffraction and X-ray fluorescence. Two-probe electrical resistivity measurements revealed a resistivity drop below the critical temperature of 4 K, which may indicate low-temperature superconductivity of the CuO thin films.

中文翻译：

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三维基体上超导CuO薄膜的原子层沉积

在过去的几十年中，对超导体的研究要么旨在寻找具有更高临界温度的材料，要么旨在发现非典型的超导行为。在这里，我们介绍了铜（CuO）薄膜，这些薄膜是通过使用金属有机前体，铜（II）-双-（-二甲基氨基-2-丙氧化物）和臭氧作为氧化剂通过原子层沉积合成的。通过采用石英晶体监测来优化沉积工艺，沉积膜与平面和三维SiO _2的接触用聚焦离子束模块通过扫描电子显微镜检查/ Si衬底。通过X射线衍射和X射线荧光分析相和元素组成。两次探针的电阻率测量表明，电阻率下降到4 K的临界温度以下，这可能表明CuO薄膜具有低温超导性。