Ternary FeCrNi thin films were sputtered on polyimide substrates from the source (austenitic AISI 304 stainless steel) under the substrate rotation speeds of 0, 15, 30 and 45 rpm, respectively. The films with 50 nm thickness were sputtered at 0.9 nm/s. To the elemental measurements, while the Fe content slightly varied, Ni increased and Cr content decreased as the rotation speed increased. And, all films have a single crystal of (110) peak at the angle of 2θ ≈ 44.7° which is body-centred tetragonal (bct) martensitic α′-phase. Also, the peak intensity of (110) slightly varied as a result of changes of FeCrNi martensitic alloy contents in the films. Moreover, increasing substrate rotation speed resulted in a decrease in grain size. The morphologic analysis by a scanning electron microscope and an atomic force microscopy displayed a more homogenous structure and the decrease of film roughness parameters with increasing of rotation speed, respectively. For magnetic measurements, the saturation magnetisation, M_s increased from 995 to 1172 emu/cm³ and the coercivity, H_c decreased from 88 to 52 Oe with the increase of rotation speed. In the films, the increases of the martensitic structure formations and the decrease of the grain size were observed to have probably caused the increase of the M_S values and the decrease of the H_C values, respectively. As observed from the XRD results, ferromagnetic behaviour of the films may be due to the martensitic phase since austenitic phase has a weak paramagnetic behaviour as a source material at room temperature. From the parallel and perpendicular hysteresis loops, the films can also be obtained to have uniaxial in-plane anisotropy with increasing rotation speed. It is seen that the film properties can be easily varied by changing rotation speed for potentially new device applications such as spintronics, magnetic hetero-structures, magnetic separators, etc. on flexible substrates.

将三元FeCrNi薄膜分别以0、15、30和45 rpm的基板转速从光源（奥氏体AISI 304不锈钢）溅射到聚酰亚胺基板上。以0.9nm / s溅射具有50nm厚度的膜。对于元素测量，虽然Fe含量略有变化，但随着转速增加，Ni含量增加，而Cr含量下降。并且，所有的薄膜具有（110）峰的单晶以2的角度θ 听，说：44.7°，这是体心四方（BCT）马氏体α'-相。另外，由于膜中FeCrNi马氏体合金含量的变化，（110）的峰强度略有变化。而且，增加基板旋转速度导致晶粒尺寸减小。扫描电子显微镜和原子力显微镜的形态分析表明，随着转速的提高，结构更加均匀，膜粗糙度参数降低。对于磁测量，饱和磁化强度M _s从995增加到1172 emu / cm ³，矫顽力H _c随着转速的增加，从88 Oe降低到52 Oe。在膜中，观察到马氏体组织形成的增加和晶粒尺寸的减小可能导致了M _S值的增加和H _C的减小。值。如从XRD结果所观察到的，由于在室温下奥氏体相作为源材料具有弱的顺磁行为，所以膜的铁磁行为可能是由于马氏体相引起的。从平行和垂直磁滞回线，还可以得到具有随转速增加而具有单轴面内各向异性的膜。可以看出，通过改变旋转速度，可以很容易地改变膜的性能，以用于潜在的新设备应用，例如柔性基板上的自旋电子器件，磁性异质结构，磁性分离器等。