This paper examines the simulation-based performances of piezoelectric MEMS vibration energy harvester made up of two Tapered-L shaped springs and one seismic mass, which is designed for supplying energy to the bearing fault observing device or else identifying the defect in small bearing. The proposed novel structure having PZT-5A piezoelectric material is designed and analyzed in finite element method simulator COMSOL by utilizing vibration data-based comparison results of healthy and defective bearing from an experimental setup. Time domain analysis, fast Fourier transform, and Morlet wavelet transform are done on acquired vibration signatures to investigate the bearing condition. Experimental results demonstrate 0.09 g and 0.25 g peak acceleration for defect free and defective bearing, respectively. And bearing generated frequency when the ball passes the outer race of the ball bearing is obtained to be 76.3 Hz. Maximum observed power outputs from the Tapered-L shaped device are 22.96 nW and 177.49 nW at 0.09 g and 0.25 g accelerations, respectively over 76.3 Hz resonant frequency and 100 kΩ load resistance.

本文研究了由两个圆锥形L型弹簧和一个地震质量组成的压电MEMS振动能量收集器基于仿真的性能，该能量收集器旨在为轴承故障观测设备提供能量或识别小型轴承中的缺陷。利用基于振动数据的健康轴承和不良轴承的比较结果，通过实验设置，在有限元方法模拟器COMSOL中设计并分析了建议的具有PZT-5A压电材料的新型结构。对获得的振动信号进行时域分析，快速傅立叶变换和Morlet小波变换，以研究轴承状况。实验结果表明，无缺陷轴承和有缺陷轴承的峰值加速度分别为0.09 g和0.25 g。并且，当球经过球轴承的外圈时，轴承产生的频率为76.3Hz。在70.0 Hz谐振频率和100kΩ负载电阻下，在0.09 g和0.25 g加速度下，Taperred-L形器件的最大观测功率输出分别为22.96 nW和177.49 nW。