This work presents an approach for formaldehyde detection using Sn doped ZnO thin film. The concentration of Sn dopant varies at 0.5at%, 1.0at% and 1.5at%. XRD results show that the thin film possessed a crystallite structure with the highest peak at 002. The crystallite size of undoped, 0.5at%, 1.0at% and 1.5at% Sn doped ZnO thin film are 10.09 nm, 33.36 nm, 8.736 nm and 9.31 nm, respectively. Surface roughness obtained from AFM was 16.9 nm, 10.19 nm, 5.48 nm and 8.57 nm for undoped 0.5at%, 1.0at% and 1.5at% Sn doped ZnO thin film, respectively. The optimal sensitivity is acquired when 1.0at% Sn doped ZnO thin film is used for the detection of 3.4 ppb formaldehyde, where the sensing performance is 92%; while the sensing performance of undoped thin film is only 50%. The response time for undoped and 1.0at% Sn doped ZnO thin film is 10-8 s and 4-10 s, while the recovery time is 38-207 s and 15-34 s, respectively. The 1.0at% Sn doped ZnO thin film also demonstrates a good response in formaldehyde sensing, which was measured for nine consecutive days, where the sensing performance was over 90%.

这项工作提出了一种使用掺Sn的ZnO薄膜进行甲醛检测的方法。Sn掺杂剂的浓度在0.5at％，1.0at％和1.5at％处变化。XRD结果表明该薄膜具有在002处具有最高峰的微晶结构。未掺杂，0.5at％，1.0at％和1.5at％的Sn掺杂ZnO薄膜的微晶尺寸分别为10.09nm，33.36nm，8.736nm和1.5nm。分别为9.31 nm。对于未掺杂0.5at％，1.0at％和1.5at％的Sn掺杂的ZnO薄膜，从AFM获得的表面粗糙度分别为16.9nm，10.19nm，5.48nm和8.57nm。当使用1.0at％的Sn掺杂的ZnO薄膜检测3.4 ppb的甲醛时，可以获得最佳的灵敏度，其感测性能为92％。而未掺杂薄膜的感测性能仅为50％。未掺杂和1的响应时间。0at％Sn掺杂的ZnO薄膜为10-8 s和4-10 s，而恢复时间分别为38-207 s和15-34 s。1.0at％Sn掺杂的ZnO薄膜在甲醛感测中也表现出良好的响应，连续九天进行了测量，感测性能超过90％。