Measurement of trace moisture is important in industry to maintain the quality and yield of products, such as semiconductors, lithium-ion batteries, and organic electroluminescence devices. In the field, on-site calibration of a trace moisture analyzer is required to maintain its reliability. Given these circumstances, we previously developed a ball surface acoustic wave (SAW) sensor using SAW on spherical piezoelectric elements and reported its quick response as its advantage over other trace moisture analyzers. However, the ultimately short response time of less than 1 s has not been verified, and it has not yet been calibrated on-site. In this study, we developed a system for the injection of saturated water vapor to evaluate the quick response of a trace moisture analyzer, and we verified the quick response time of as short as 0.64 s. It is the shortest response time reported so far. In addition, to realize its on-site calibration, we developed a dynamic calibration method, which takes only 10 min, by the injection of saturated water vapor, in contrast to the presently available static calibration method that takes 10 h. Since this system consists of simple components, it can be downsized. Moreover, because it uses a small amount of saturated water vapor as the calibration gas, it is easy to prepare calibration gases in the field and may be applied to on-site calibration.

中文翻译：

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基于球面声波传感器快速响应的痕量水分测定仪动态校准方法

在工业中，微量水分的测量对于保持半导体、锂离子电池和有机电致发光器件等产品的质量和产量非常重要。在现场，需要对痕量水分测定仪进行现场校准以保持其可靠性。鉴于这些情况，我们之前开发了一种在球形压电元件上使用 SAW 的球面声波 (SAW) 传感器，并将其快速响应报告为优于其他痕量水分分析仪的优势。但是，最终不到 1 s 的短响应时间尚未得到验证，也尚未进行现场校准。在本研究中，我们开发了一种用于注入饱和水蒸气的系统来评估痕量水分分析仪的快速响应，我们验证了其快速响应时间短至 0.64 秒。这是迄今为止报告的最短响应时间。此外，为了实现现场标定，我们开发了一种动态标定方法，通过注入饱和水蒸气仅需 10 分钟，而目前可用的静态标定方法需要 10 小时。由于该系统由简单的组件组成，因此可以缩小尺寸。而且，由于采用少量的饱和水蒸气作为校准气，在现场制备校准气很容易，可应用于现场校准。由于该系统由简单的组件组成，因此可以缩小尺寸。而且，由于采用少量的饱和水蒸气作为校准气，在现场制备校准气很容易，可应用于现场校准。由于该系统由简单的组件组成，因此可以缩小尺寸。而且，由于采用少量的饱和水蒸气作为校准气，在现场制备校准气很容易，可应用于现场校准。