Abstract

We propose a method of signal amplification for the scanning probe microscope mode, in which the distribution of the surface potential of a sample is measured simultaneously with topography using a local probe based on a field-effect transistor with a nanowire channel. The application of a method is especially relevant in the study of the electric potential of the surface in the case when it is covered with a dielectric layer that strongly weakens the electric field of the detected electric charges. A key feature of the method is in additional coating the surface of the dielectric layer with thin film of chromium (\(R_{\textrm{square}}>10\) k\(\Omega\); a film thickness is \({\sim}7\) nm). This film consists of small conductive granules separated by tunnel barriers. It was experimentally shown on the fabricated test structures that a signal attenuated by a dielectric layer can be restored by \(70{-}80\%\). We estimated the sensitivity of transistors integrated into the probe of a scanning probe microscope in the range of \(2{-}5\) mV in single frequency band at a frequency of \(100\) Hz.

中文翻译：

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一种重构介电层表面电位分布的方法

摘要

我们提出了一种用于扫描探针显微镜模式的信号放大方法，其中，使用基于带有纳米线通道的场效应晶体管的局部探针，与局部测量同时测量样品表面电势的分布。该方法的应用在表面的电势研究中特别重要，当表面被电介质层覆盖时，该电介质层会大大削弱检测到的电荷的电场。该方法的一个关键特征是在电介质层的表面上再镀一层铬（\（R _ {\ textrm {square}}> 10 \） k \（\ Omega \）薄膜；薄膜厚度为\（ {\ sim} 7 \）nm）。该膜由被隧道势垒隔开的小的导电颗粒组成。实验表明，在制作的测试结构上，被电介质层衰减的信号可以恢复\（70 {-} 80 \％\）。我们估计了集成到扫描探针显微镜探针中的晶体管在\（100 \） Hz的单个频带中\（2 {-} 5 \） mV范围内的灵敏度。