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Flat-Probe Diagnostic Methods for Collisional Plasma Flowing from Technological Plasmatrons
Journal of Machinery Manufacture and Reliability Pub Date : 2020-03-16 , DOI: 10.3103/s1052618820010082
V. A. Kotelnikov , M. V. Kotelnikov , G. S. Filippov

Abstract

Based on computational and full-scale experiments, several algorithms have been developed for processing current–voltage curves obtained for flat wall and remote probes in the case of a weakly ionized low-temperature collisional plasma. The proposed diagnostic methods could be useful for specialists employing technological plasmatrons in various sectors of the national economy such as plasma chemistry, plasma-enhanced deposition, plasma processing of materials, gas-extraction and petroleum-production industries, in aviation and rocket engineering, and in other fields.


中文翻译:

等离子体产生的碰撞等离子体的平面探针诊断方法

摘要

基于计算和大规模实验,在弱电离的低温碰撞等离子体的情况下,已经开发了几种算法来处理从平壁探头和远程探头获得的电流-电压曲线。所提出的诊断方法对于在国民经济各个部门使用技术等离子加速器的专家可能有用,例如等离子体化学,等离子体增强沉积,材料的等离子体处理,气体提取和石油生产行业,航空和火箭工程以及在其他领域。
更新日期:2020-03-16
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