This paper has designed an anchor point lever beam coupled tuning fork micro-gyroscope and tested its output performance. The tuning fork micro-gyro is designed to eliminate the output error caused by orthogonal coupling and in-phase-inverting coupling by structural decoupling and electrical decoupling, and can improve the anti-vibration performance and the modal optimization ability. It has derived the dynamic response working model of the non-ideal tuning fork micro-gyroscope, and optimized the structural parameters of the micro-gyroscope by simulation analysis. The microstructure processing has been realized by the SOI-MEMS process, sealed the processed structural prototype, and tested the performance through the established experimental system. According to the test results, the designed micro-gyroscope driving direction has greatly reduced the in-phase-inverting coupling through the anchor coupling lever beam, and the detection direction effectively suppressed the in-phase-inverting coupling through the stiffness matching electrode. While closed-loop detecting, the measured Aallan variance zero-bias stability is 1.779°/h, and the 1σ zero-bias stability is 8.3°/h. While applying a stiffness matching voltage, the measured vibration sensitivity is 23.9°/h/g.

本文设计了一种锚点杠杆光束耦合音叉微陀螺仪，并对其输出性能进行了测试。音叉微陀螺仪通过结构去耦和电去耦来消除正交耦合和同相反相耦合引起的输出误差，可以提高抗振性能和模态优化能力。推导了非理想音叉微型陀螺仪的动态响应工作模型，并通过仿真分析优化了微型陀螺仪的结构参数。通过SOI-MEMS工艺实现了微结构加工，密封了加工后的结构原型，并通过建立的实验系统测试了性能。根据测试结果，设计的微型陀螺仪驱动方向大大减少了通过锚固耦合杆梁的同相耦合，而检测方向则有效地抑制了通过刚度匹配电极的同相耦合。闭环检测时，测得的Aallan方差零偏稳定性为1.779°/ h，1σ零偏稳定性为8.3°/ h。在施加刚度匹配电压时，测得的振动灵敏度为23.9°/ h / g。