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Research on an Anchor Point Lever Beam Coupling Type Tuning Fork Micro-gyroscope

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Abstract

This paper has designed an anchor point lever beam coupled tuning fork micro-gyroscope and tested its output performance. The tuning fork micro-gyro is designed to eliminate the output error caused by orthogonal coupling and in-phase-inverting coupling by structural decoupling and electrical decoupling, and can improve the anti-vibration performance and the modal optimization ability. It has derived the dynamic response working model of the non-ideal tuning fork micro-gyroscope, and optimized the structural parameters of the micro-gyroscope by simulation analysis. The microstructure processing has been realized by the SOI-MEMS process, sealed the processed structural prototype, and tested the performance through the established experimental system. According to the test results, the designed micro-gyroscope driving direction has greatly reduced the in-phase-inverting coupling through the anchor coupling lever beam, and the detection direction effectively suppressed the in-phase-inverting coupling through the stiffness matching electrode. While closed-loop detecting, the measured Aallan variance zero-bias stability is 1.779°/h, and the 1σ zero-bias stability is 8.3°/h. While applying a stiffness matching voltage, the measured vibration sensitivity is 23.9°/h/g.

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Data Availability Statement

All data used to support the findings of this study are included within the article.

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Acknowledgements

This work is supported by the funds of the the first batch of national virtual simulation experiment teaching project, China (No. 201806022) and overseas visiting project jointly sponsored by Shandong Province and Shandong University of Science and Technology.

Funding

This work is also supported by the funds of the overseas visiting project jointly sponsored by Shandong Province and Shandong University of Science and Technology.

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Authors and Affiliations

  1. College of Mechanical and Electronic Engineering, Shandong University of Science and Technology, Qian Wangang Road No. 579, Qingdao, 266590, Shandong, China

    Lian-min Cao, Jian-wei Li, Xian-wen Liu & Feng-yao Sun

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  1. Lian-min Cao
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  2. Jian-wei Li
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Correspondence to Lian-min Cao.

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Cao, Lm., Li, Jw., Liu, Xw. et al. Research on an Anchor Point Lever Beam Coupling Type Tuning Fork Micro-gyroscope. Int. J. Precis. Eng. Manuf. 21, 1099–1111 (2020). https://doi.org/10.1007/s12541-020-00327-7

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  • DOI: https://doi.org/10.1007/s12541-020-00327-7

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