当前位置:
X-MOL 学术
›
ECS J. Solid State Sci. Technol.
›
论文详情
Our official English website, www.x-mol.net, welcomes your
feedback! (Note: you will need to create a separate account there.)
Erratum: Galvanic corrosion inhibitors for Cu/Ru couple during chemical mechanical polishing of Ru [ ECS J. Solid-State Sci. Technol., [https://doi.org/10.1149/2.0181701jss] 7 , P62 (2017) ]
ECS Journal of Solid State Science and Technology ( IF 1.8 ) Pub Date : 2020-05-10 , DOI: 10.1149/2162-8777/ab8f1a Jie Cheng , Tongqing Wang , Xinchun Lu
ECS Journal of Solid State Science and Technology ( IF 1.8 ) Pub Date : 2020-05-10 , DOI: 10.1149/2162-8777/ab8f1a Jie Cheng , Tongqing Wang , Xinchun Lu
Description unavailable
中文翻译:
勘误:在Ru的化学机械抛光过程中,Cu / Ru对的电化腐蚀抑制剂[ECS J.固态科学。技术,[https://doi.org/10.1149/2.0181701jss] 7,P62(2017)]
说明不可用
更新日期:2020-05-10
中文翻译:
勘误:在Ru的化学机械抛光过程中,Cu / Ru对的电化腐蚀抑制剂[ECS J.固态科学。技术,[https://doi.org/10.1149/2.0181701jss] 7,P62(2017)]
说明不可用