This paper presents a Raman spectroscopy study of the influence of methane flow on the micro-tribological behavior of diamond-like carbon coatings deposited with an industrial plasma-enhanced chemical vapor deposition system. Results have shown a direct relationship between the methane flow and thickness of the coatings. The analysis of the Raman spectra and deposition parameters allowed establishing the influence of H content with the methane flow, the disorder level and estimation of the sp³ fraction on the carbon coatings. The micro-tribology tests showed a strong dependence of the wear resistance and hardness with Raman parameters. The coating deposited at 72-sccm methane flow presented a thickness of 1.7 µm and a sp³ fraction of 0.33. This sp³ fraction gave rise to a hardness of 24 GPa and an excellent wear resistance of 3.3 × 10^–6 mm³ N⁻¹ mm⁻¹ for this DLC coating. Wear tests showed a swelling in the wear profiles on this coating, which was associated with the occurrence of a re-hybridization process.

本文介绍了拉曼光谱研究甲烷流量对工业等离子体增强化学气相沉积系统沉积的类金刚石碳涂层的微摩擦行为的影响。结果表明甲烷流量与涂层厚度之间存在直接关系。通过对拉曼光谱和沉积参数的分析，可以确定H含量对甲烷流量，无序度的影响以及对碳涂层的sp ³分数的估计。微观摩擦学测试表明，耐磨性和硬度与拉曼参数有很强的相关性。在72 sccm甲烷流量下沉积的涂层厚度为1.7 µm，sp ³分数为0.33。这个sp ³对于该DLC涂层，该分数可产生24 GPa的硬度和3.3×10 ^–6 mm ³  N ^-1  mm ^-1的出色耐磨性。磨损测试表明，该涂层的磨损曲线膨胀，这与再混合过程的发生有关。