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A simple Peltier cold trap aperture for protection of vacuum UV optics against hydrocarbons and reliable calibration of VUV spectrometers using D 2 lamps
Measurement Science and Technology ( IF 2.7 ) Pub Date : 2020-04-28 , DOI: 10.1088/1361-6501/ab7f7a
Marcel Fiebrandt , Peter Awakowicz

A simple Peltier cooled cold trap aperture is presented to minimize the flux of hydrocarbons on optics in vacuum UV systems. The system can be cooled down to −40 °C under vacuum. To test the effect of the cold trap, the aperture is placed in front of a high-intensity D 2 lamp used for calibration in the range of 116 nm to 300 nm which is flanged to a VUV spectrometer. The influence of the aperture temperature is monitored by measuring the intensity loss rate of the Lyman-alpha emission line at 121.6 nm due to the formation of carbon contamination on the MgF 2 window of the lamp depending on the Peltier temperature. The application of the aperture significantly reduced the intensity loss from approx. 20% h −1 to less than 2% h −1 and enables the reliable use of a D 2 lamp for the relative intensity calibration of the spectrometer.

中文翻译:

一个简单的Peltier冷阱孔径,用于保护真空紫外线光学器件免受碳氢化合物侵害,并使用D 2灯可靠地校准VUV光谱仪

提出了一个简单的珀耳帖冷却冷阱孔径,以最小化真空紫外线系统中光学器件上的碳氢化合物通量。可以在真空下将系统冷却至−40°C。为了测试冷阱的效果,将孔径放置在用于校准的116 nm至300 nm范围内的高强度D 2灯的前面,该灯连接VUV光谱仪。通过根据帕尔贴温度,在灯的MgF 2窗口上形成碳污染,通过测量在121.6 nm处的莱曼-α发射线的强度损失率,来监测孔径温度的影响。孔的应用大大降低了强度损失。h%20%到2%h -1以下,并且能够可靠地使用D 2灯进行光谱仪的相对强度校准。
更新日期:2020-04-28
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