Abstract

The postgrowth processing of mesa structures for multijunction solar cells based on GaInP/GaInAs/Ge heterostructure has been studied. Methods of wet chemical and electrochemical etching are considered, and a technology of forming a separation mesa structure is proposed that ensures improved surface quality and profile of the side wall of a mesa for heterostructures with various compositions of layers.

中文翻译：

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在多结太阳能电池创建过程中对台面结构进行湿化学腐蚀的开发方法

摘要

研究了基于GaInP / GaInAs / Ge异质结构的多结太阳能电池台面结构的后生长处理。考虑了湿法化学和电化学蚀刻的方法，并且提出了形成分离台面结构的技术，该技术确保针对具有各种层组成的异质结构改善的台面侧壁的表面质量和轮廓。