Transition-edge sensors (TESs) exhibiting high energy resolution for single optical photons have been applied to photon-counting microscopy for biological imaging. This paper discusses the development of TES arrays with large effective areas to expand the field of view of photon-counting microscopy and has fabricated an optical TES array comprising a Ti/Au bilayer on a Si substrate. Thermal interference due to Joule power did not affect the time constant and energy resolution of a detector in the TES array, even though the Joule power in the detector was changed by 23%. The photon signal crosstalk between adjacent detectors was − 40 dB which was negligible. Heat conduction through the Si substrate was dominant in the photon signal crosstalk between adjacent detectors.

中文翻译：

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光学过渡边缘传感器阵列的开发

对单个光学光子表现出高能量分辨率的过渡边缘传感器 (TES) 已应用于用于生物成像的光子计数显微镜。本文讨论了开发具有大有效面积的 TES 阵列以扩展光子计数显微镜的视野，并在 Si 衬底上制造了包含 Ti/Au 双层的光学 TES 阵列。焦耳功率引起的热干扰不会影响 TES 阵列中检测器的时间常数和能量分辨率，即使检测器中的焦耳功率改变了 23%。相邻探测器之间的光子信号串扰为 - 40 dB，可以忽略不计。通过 Si 衬底的热传导在相邻探测器之间的光子信号串扰中占主导地位。