Abstract
Transition-edge sensors (TESs) exhibiting high energy resolution for single optical photons have been applied to photon-counting microscopy for biological imaging. This paper discusses the development of TES arrays with large effective areas to expand the field of view of photon-counting microscopy and has fabricated an optical TES array comprising a Ti/Au bilayer on a Si substrate. Thermal interference due to Joule power did not affect the time constant and energy resolution of a detector in the TES array, even though the Joule power in the detector was changed by 23%. The photon signal crosstalk between adjacent detectors was − 40 dB which was negligible. Heat conduction through the Si substrate was dominant in the photon signal crosstalk between adjacent detectors.
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Acknowledgements
This study is partially endorsed by JST CREST JPMJCR17N4, AIST clean room for analog & digital superconductivity CRAVITY, AIST nano-processing facility NPF, NIMS nanofabrication platform NanoPla.
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Konno, T., Takasu, S., Hattori, K. et al. Development of an Optical Transition-Edge Sensor Array. J Low Temp Phys 199, 27–33 (2020). https://doi.org/10.1007/s10909-020-02367-9
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DOI: https://doi.org/10.1007/s10909-020-02367-9