Nanostructured zinc oxide sensing film was deposited on the Si/SiO 2 /Pt substrate by the RF magnetron sputtering process. The film was characterized by FESEM (field-emission scanning electron microscope) and XRD (X-ray diffraction) for their morphology and structural analysis. The FESEM results show that the film morphology is in nanophase with an average nanostructure size of ~ 50 nm. XRD results show that the film is polycrystalline. The AFM (atomic force microscopy) and Raman spectroscopy were done to analyze the surface roughness and the structural properties of the film, respectively. FTIR (Fourier-transform infrared spectroscopy) was used to analyze the presence of ZnO. Further, the ZnO nanostructure film has been explored for pH sensing for pH (4–12). The sensitivity of the film was found to be 31.81 mV/pH. The drift characteristics of the film were also done to find out the stability of the film.

中文翻译：

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用于 pH 传感应用的 ZnO 纳米结构薄膜的开发

通过RF磁控溅射工艺在Si/SiO 2 /Pt衬底上沉积纳米结构的氧化锌传感膜。通过FESEM（场发射扫描电子显微镜）和XRD（X射线衍射）对薄膜进行形态和结构分析。FESEM 结果表明薄膜形态为纳米相，平均纳米结构尺寸约为 50 nm。XRD结果表明该薄膜是多晶的。AFM（原子力显微镜）和拉曼光谱分别用于分析薄膜的表面粗糙度和结构特性。FTIR（傅立叶变换红外光谱）用于分析ZnO的存在。此外，已经探索了 ZnO 纳米结构膜用于 pH 值（4-12）的 pH 传感。发现薄膜的灵敏度为 31.81 mV/pH。