Abstract
Nanostructured zinc oxide sensing film was deposited on the Si/SiO2/Pt substrate by the RF magnetron sputtering process. The film was characterized by FESEM (field-emission scanning electron microscope) and XRD (X-ray diffraction) for their morphology and structural analysis. The FESEM results show that the film morphology is in nanophase with an average nanostructure size of ~ 50 nm. XRD results show that the film is polycrystalline. The AFM (atomic force microscopy) and Raman spectroscopy were done to analyze the surface roughness and the structural properties of the film, respectively. FTIR (Fourier-transform infrared spectroscopy) was used to analyze the presence of ZnO. Further, the ZnO nanostructure film has been explored for pH sensing for pH (4–12). The sensitivity of the film was found to be 31.81 mV/pH. The drift characteristics of the film were also done to find out the stability of the film.
Similar content being viewed by others
References
Q. Zhang, K. Zhang, D. Xu, G. Yang, H. Huang, F. Nie, C. Liu, S. Yang, CuO nanostructures: synthesis, characterization, growth mechanisms, fundamental properties, and applications. Prog. Mater Sci. 1(60), 208–337 (2014)
Q. Shao, R.H. Que, M.W. Shao, Q. Zhou, D.D. Ma, S.T. Lee, Shape controlled flower-like silicon oxide nanowires and their pH response. Appl. Surf. Sci. 257(13), 5559–5562 (2011)
X. Fang, T. Zhai, U.K. Gautam, L. Li, L. Wu, Y. Bando, D. Golberg, ZnS nanostructures: from synthesis to applications. Prog. Mater Sci. 56(2), 175–287 (2011)
P. Bergveld, Development of an ion-sensitive solid-state device for neurophysiological measurements. IEEE Trans. Biomed. Eng. 1, 70–71 (1970)
I. Lauks, P. Chan, D. Babic, The extended gate chemically-sensitive field effect transistor as multi-species microprobe. Sens. Actuators 4, 291–298 (1983)
S.A. Pullano, C.D. Critello, I. Mahbub, N.T. Tasneem, S. Shamsir, S.K. Islam, M. Greco, A.S. Fiorillo, EGFET-based sensors for bioanalytical applications: a review. Sensors. 18(11), 4042 (2018)
J.Y. Li, S.P. Chang, S.J. Chang, T.Y. Tsai, Sensitivity of EGFET pH sensors with TiO2 nanowires. ECS Solid State Lett. 3(10), 123–126 (2014)
Q. Li, H. Li, J. Zhang, Z. Xu, A novel pH potentiometric sensor based on electrochemically synthesized polybisphenol A films at an ITO electrode. Sens. Actuators B Chem. 155(2), 730–736 (2011)
P. Sharma, S. Gupta, R. Singh, K. Ray, S.L. Kothari, S. Sinha, R. Sharma, R. Mukhiya, K. Awasthi, M. Kumar, Hydrogen ion sensing characteristics of Na3BiO4–Bi2O3 mixed oxide nanostructures based EGFET pH sensor. Int. J. Hydrog. Energy. (2019). https://doi.org/10.1016/j.ijhydene.2019.07.252
S.P. Chang, T.H. Yang, Sensing performance of EGFET pH sensors with CuO nanowires fabricated on glass substrate. Int. J. Electrochem. Sci. 7, 5020–5027 (2012)
S.X. Chen, S.P. Chang, S.J. Chang, Investigation of InN nanorod-based EGFET pH sensors fabricated on quartz substrate. Dig. J. Nanomater. Biostruct. 9, 1505–1511 (2014)
A. Janotti, C.G. Van de Walle, Fundamentals of zinc oxide as a semiconductor. Rep. Prog. Phys. 72(12), 126501 (2009)
K. Hara, T. Horiguchi, T. Kinoshita, K. Sayama, H. Sugihara, H. Arakawa, Highly efficient photon-to-electron conversion with mercurochrome-sensitized nanoporous oxide semiconductor solar cells. Sol. Energy Mater. Sol. Cells 64(2), 115–134 (2000)
J.I. Oda, J.I. Nomoto, T. Miyata, T. Minami, Improvements of spatial resistivity distribution in transparent conducting Al-doped ZnO thin films deposited by DC magnetron sputtering. Thin Solid Films 518(11), 2984–2987 (2010)
Yen WT, Ke JH, Wang HJ, Lin YC, Chiang JL, in Influences on optoelectronic properties of damp heat stability of AZO and GZO for thin film solar cells. Advanced Materials Research 2009, vol. 79 (Trans Tech Publications), pp. 923–926
Y. Liu, M. Zhong, G. Shan, Y. Li, B. Huang, G. Yang, Biocompatible ZnO/Au nanocomposites for ultrasensitive DNA detection using resonance Raman scattering. J. Phys. Chem. B 112(20), 6484–6489 (2008)
M. Tak, V. Gupta, M. Tomar, Flower-like ZnO nanostructure based electrochemical DNA biosensor for bacterial meningitis detection. Biosens. Bioelectron. 15(59), 200–207 (2014)
H.C. Pan, M.H. Shiao, C.Y. Su, C.N. Hsiao, Influence of sputtering parameter on the optical and electrical properties of zinc-doped indium oxide thin films. J. Vac. Sci. Technol., A 23(4), 1187–1191 (2005)
X. Zhang, Z. Dong, S. Liu, Y. Shi, Y. Dong, W. Feng, Maize straw-templated hierarchical porous ZnO: Ni with enhanced acetone gas sensing properties. Sens. Actuators B Chem. 1(243), 1224–1230 (2017)
X. Zhao, Y. Li, C. Ai, D. Wen, Resistive switching characteristics of li-doped ZnO thin films based on magnetron sputtering. Materials. 12(8), 1282 (2019)
S. Singh, A. Singh, R.R. Yadav, P. Tandon, Growth of zinc ferrite aligned nanorods for liquefied petroleum gas sensing. Mater. Lett. 15(131), 31–34 (2014)
A.K. Jaiswal, S. Singh, A. Singh, R.R. Yadav, P. Tandon, B.C. Yadav, Fabrication of Cu/Pd bimetallic nanostructures with high gas sorption ability towards development of LPG sensor. Mater. Chem. Phys. 15(154), 16–21 (2015)
K.A. Alim, V.A. Fonoberov, M. Shamsa, A.A. Balandin, Micro-Raman investigation of optical phonons in ZnO nanocrystals. J. Appl. Phys. 97(12), 124313 (2005)
S.B. Yahia, L. Znaidi, A. Kanaev, J.P. Petitet, Raman study of oriented ZnO thin films deposited by sol–gel method. Spectrochim. Acta Part A Mol. Biomol. Spectrosc. 71(4), 1234–1238 (2008)
D.L. Golic, G. Brankovic, M.P. Nešic, K. Vojisavljevic, A. Recnik, N. Daneu, S. Bernik, M. Šcepanovic, D. Poleti, Z. Brankovic, Structural characterization of self-assembled ZnO nanoparticles obtained by the sol–gel method from Zn (CH3COO) 2 2H2O. Nanotechnology. 22(395603), 9 (2011)
R. Cuscó, E. Alarcón-Lladó, J. Ibanez, L. Artús, J. Jiménez, B. Wang, M.J. Callahan, Temperature dependence of Raman scattering in ZnO. Phys. Rev. B. 75(16), 165202 (2007)
Calizo I, Alim KA, Fonoberov VA, Krishnakumar S, Shamsa M, Balandin AA, Kurtz R, in Micro-Raman spectroscopic characterization ZnO quantum dots, nanocrystals, and nanowires. Quantum Dots, Particles, and Nanoclusters IV 2007, vol 6481. International Society for Optics and Photonics, p. 64810 N
S.S. Kanmani, K. Ramachandran, S. Umapathy, Eosin yellowish dye-sensitized ZnO nanostructure-based solar cells employing solid PEO redox couple electrolyte. Int. J. Photoenergy (2012). https://doi.org/10.1155/2012/267824
M. Rajalakshmi, A.K. Arora, B.S. Bendre, S. Mahamuni, Optical phonon confinement in zinc oxide nanoparticles. J. Appl. Phys. 87(5), 2445–2448 (2000)
B.N. Dole, V.D. Mote, V.R. Huse, Y. Purushotham, M.K. Lande, K.M. Jadhav, S.S. Shah, Structural studies of Mn doped ZnO nanoparticles. Curr. Appl. Phys. 11(3), 762–766 (2011)
K.S. Babu, A.R. Reddy, C. Sujatha, K.V. Reddy, A.N. Mallika, Synthesis and optical characterization of porous ZnO. J. Adv. Ceram. 2(3), 260–265 (2013)
M. Khan, A.H. Naqvi, M. Ahmad, Comparative study of the cytotoxic and genotoxic potentials of zinc oxide and titanium dioxide nanoparticles. Toxicol. Rep. 1(2), 765–774 (2015)
K. Khun, Z.H. Ibupoto, M.S. AlSalhi, M. Atif, A.A. Ansari, M. Willander, Fabrication of well-aligned ZnO nanorods using a composite seed layer of ZnO nanoparticles and chitosan polymer. Materials 6(10), 4361–4374 (2013)
D.E. Yates, S. Levine, T.W. Healy, Site-binding model of the electrical double layer at the oxide/water interface. J. Chem. Soc. Faraday Trans. Phys. Chem. Condens. Phases. 70, 1807–1818 (1974)
R.E. Van Hal, J.C. Eijkel, P. Bergveld, A novel description of ISFET sensitivity with the buffer capacity and double-layer capacitance as key parameters. Sens. Actuators B Chem. 24(1–3), 201–205 (1995)
H.K. Liao, L.L. Chi, J.C. Chou, W.Y. Chung, T.P. Sun, S.K. Hsiung, Study on pHpzc and surface potential of tin oxide gate ISFET. Mater. Chem. Phys. 59(1), 6–11 (1999)
K.B. Oldham, A Gouy–Chapman–Stern model of the double layer at a (metal)/(ionic liquid) interface. J. Electroanal. Chem. 613(2), 131–138 (2008)
S. Al-Hilli, R. Al-Mofarji, P. Klason, N. Gutman, A. Sa’Ar, A. Ost , P. Stralfors, M. Willander. Zinc oxide nanorods as an intracellular pH sensor, European Nano Systems (ENS) Worshop, Paris, France, 03–04 December 2007, pp. 38–43
A. Wei, L. Pan, W. Huang, Recent progress in the ZnO nanostructure-based sensors. Mater. Sci. Eng., B 176(18), 1409–1421 (2011)
Acknowledgements
The authors acknowledge IIT, Jodhpur for extending the experimental facility, and MRC, MNIT Jaipur for characterization facilities. Authors are also thankful to CSIR, New Delhi for providing the research facilities and financial support. They also acknowledge the support of Director, CSIR-CEERI, Pilani.
Author information
Authors and Affiliations
Corresponding authors
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Sharma, P., Bhati, V.S., Kumar, M. et al. Development of ZnO nanostructure film for pH sensing application. Appl. Phys. A 126, 284 (2020). https://doi.org/10.1007/s00339-020-03466-w
Received:
Accepted:
Published:
DOI: https://doi.org/10.1007/s00339-020-03466-w