Electronic Materials Letters ( IF 2.1 ) Pub Date : 2009 , DOI: 10.3365/eml.2009.09.095 Taek Sung Kim , Sang-Sik Choi , Tae Soo Jeong , Sukil Kang , Chel-Jong Choi , Kyu-Hwan Shim
A pin photo-diode was fabricated from the Si0.2Ge0.8/Si strained multiple quantum-well (MQW) structure grown by using ultra high vacuum chemical vapor deposition (UHV-CVD). The structural properties of the Si0.2Ge0.8/Si strained MQW were investigated using high-resolution X-ray diffraction (HRXRD). Specifically, the recent advances in the dry etching of Si0.2Ge0.8Si strained MQW have been used to define pin photo-diode active layer mesas. The current-voltage (I-V) characteristic of pin photodiodes fabricated from these MQWs was measured. Also, the spectral response spectrum of pin photodiodes was measured at room temperature.
中文翻译:
用Si制作PIN光电二极管
通过使用超高真空化学气相沉积(UHV-CVD)生长的Si 0.2 Ge 0.8 / Si应变多量子阱(MQW)结构制造了pin光电二极管。使用高分辨率X射线衍射(HRXRD)研究了Si 0.2 Ge 0.8 / Si应变MQW的结构性能。具体地,Si 0.2 Ge 0.8 Si应变的MQW的干法蚀刻中的最新进展已经用于限定pin光电二极管有源层台面。测量了由这些MQW制成的引脚光电二极管的电流-电压(IV)特性。另外,在室温下测量pin光电二极管的光谱响应光谱。