Abstract TiCN/TiNbCN multilayers were deposited on silicon substrates by r.f. magnetron sputtering with alternatively changing the sputtering plasma composition between pure Ti + C and Nb elements under a reactive mixture Ar/N2. Bilayer period values varied from nanometric range (15 nm) to higher micrometric range (1.5 μm). The coatings structural and stoichiometric properties were analyzed by HAX-ray, X-ray photoelectron spectroscopy (XPS), secondary ion mass spectrometry (SIMS) and cross-sectional transmission electron microscopy (HRTEM). The multilayer period and relative thickness were clearly determined, and a growth structure was found on the TiCN/TiNbCN multilayers. Additionally, an epitaxial relationship was found between layers inside each columnar crystallite, given by (111)[110]TiCN//(111)[110]TiNbCN. The mechanical properties showed an evolution as function of bilayer period increase under cube-on-cube epitaxial growth effect.

中文翻译：

---

金属碳-氮化物系统多层效应证据的确定

摘要 TiCN/TiNbCN 多层膜通过射频磁控溅射沉积在硅衬底上，在反应混合物 Ar/N2 下交替改变纯 Ti + C 和 Nb 元素之间的溅射等离子体成分。双层周期值从纳米范围 (15 nm) 到更高的微米范围 (1.5 μm)。通过HAX射线、X射线光电子能谱（XPS）、二次离子质谱（SIMS）和横截面透射电子显微镜（HRTEM）分析涂层的结构和化学计量特性。清楚地确定了多层周期和相对厚度，并且在 TiCN/TiNbCN 多层上发现了生长结构。此外，在每个柱状微晶内部的层之间发现了外延关系，由 (111)[110]TiCN//(111)[110]TiNbCN 给出。