Commercial aluminium electrolyte capacitors (AECs) are too large for integration in future highly integrated electronic systems. Supercapacitors, in comparison, possess a much higher capacitance per unit volume and can be embedded as passive capacitors to address such challenges in electronics scaling. However, the slow frequency response (<10¹ Hz) typical of supercapacitors is a major hurdle to their practical application. Here, it is demonstrated that 1T‐phase MoSe₂ nanosheets obtained by laser‐induced phase transformation can be used as an electrode material in embedded micro‐supercapacitors. The metallic nature of MoSe₂ nanosheet‐based electrodes provides excellent electron‐ and ion‐transport properties, which leads to an unprecedented high‐frequency response (up to 10⁴ Hz) and cycle stability (up to 10⁶ cycles) when integrated in supercapacitors, and their power density can be ten times higher than that of commercial AECs. Furthermore, fabrication processes of the present device are fully compatible with system‐in‐package device manufacturing to meet stringent specifications for the size of embedded components. The present research represents a critical step forward in in‐package and on‐chip applications of electrolytic capacitors.

中文翻译：

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具有1T相MoSe2纳米片的超高工作频率嵌入式超级电容器，适用于系统级封装应用

商用铝电解质电容器（AEC）太大，无法集成到未来的高度集成的电子系统中。相比之下，超级电容器每单位体积的电容要高得多，并且可以作为无源电容器嵌入，以应对电子规模扩展中的此类挑战。但是，超级电容器的典型慢频率响应（<10 ¹ Hz）是其实际应用的主要障碍。在此证明，通过激光诱导相变获得的1T相MoSe ₂纳米片可用作嵌入式微型超级电容器中的电极材料。MoSe ₂的金属性质基于纳米片的电极具有出色的电子和离子传输性能，当集成到超级电容器中时，可提供前所未有的高频响应（高达10 ⁴ Hz）和循环稳定性（高达10 ⁶个循环），并且功率密度可以是商业AEC的十倍。此外，本设备的制造工艺与系统级封装设备的制造完全兼容，以满足嵌入式组件尺寸的严格规范。本研究代表了电解电容器的片内和片内应用向前迈出的关键一步。