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Electrically and Thermally Tunable Smooth Silicon Metasurfaces for Broadband Terahertz Antireflection
Advanced Optical Materials ( IF 8.0 ) Pub Date : 2018-10-09 , DOI: 10.1002/adom.201800928
Lu Ding 1 , Xianshu Luo 2 , Liang Cheng 3 , Maung Thway 4 , Junfeng Song 5 , Soo Jin Chua 4 , Elbert E. M. Chia 3 , Jinghua Teng 1
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Researches in metamaterials and metasurfaces have significant impact on development of terahertz optics and progression of terahertz science and technologies. Further advancement of terahertz systems demands efficient and versatile tunable and reconfigurable metadevices for manipulating various properties of terahertz radiation. Here an electrically and thermally tunable silicon metasurface for broadband terahertz antireflection application is demonstrated. The silicon metasurface is composed by interdigitated p–n junctions fabricated using a completely complementary metal‐oxide‐semiconductor (CMOS) compatible process in a silicon photonics foundry. It is atomically smooth without any physically etched pattern nor metal antennas. By supplying bias voltage to the p–n junctions, the complex reflection coefficient of the silicon metasurface is continuously tuned between negative and positive values. Complete antireflection condition can be precisely achieved, represented by the vanishing of the echo pulse in terahertz time‐domain spectroscopy (THz‐TDS). The transmission amplitude is bias‐polarity dependent, while the phase is simultaneously manipulated. The active silicon metasurface has a unique property that it thermally tunes the reflection and electrically tunes transmission. The methodology suggests a new design concept using all‐silicon platform for making atomically smooth and electrically controlled metadevices in terahertz and other frequency ranges.

中文翻译:

电和热可调的光滑硅超颖表面,用于宽带太赫兹减反射

超材料和超表面的研究对太赫兹光学的发展和太赫兹科学技术的发展具有重大影响。太赫兹系统的进一步发展需要有效且通用的可调谐和可重新配置的元设备,以操纵太赫兹辐射的各种特性。这里展示了用于宽带太赫兹减反射应用的电学和热学可调的硅超表面。硅超表面由在硅光子铸造厂中使用完全互补的金属氧化物半导体(CMOS)兼容工艺制造的叉指式p-n结组成。它在原子上是光滑的,没有任何物理蚀刻的图案或金属天线。通过为p–n结提供偏置电压,硅超表面的复反射系数在负值和正值之间连续调整。太赫兹时域光谱(THz-TDS)中回波脉冲的消失代表了精确的完全抗反射条件。传输幅度取决于偏置极性,而相位则同时受到控制。活性硅超颖表面具有独特的性能,可热调节反射并电调节透射率。该方法论提出了一种使用全硅平台的新设计理念,用于在太赫兹和其他频率范围内制造原子级平滑且电控的元设备。以太赫兹时域光谱(THz-TDS)中回波脉冲的消失表示。传输幅度取决于偏置极性,而相位则同时受到控制。活性硅超颖表面具有独特的性能,可热调节反射并电调节透射率。该方法论提出了一种使用全硅平台的新设计概念,用于制造太赫兹和其他频率范围内原子上平滑且电控的元设备。以太赫兹时域光谱(THz-TDS)中回波脉冲的消失表示。传输幅度取决于偏置极性,而相位则同时受到控制。活性硅超颖表面具有独特的性能,可热调节反射并电调节透射率。该方法论提出了一种使用全硅平台的新设计概念,用于制造太赫兹和其他频率范围内原子上平滑且电控的元设备。
更新日期:2018-10-09
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