Abstract Elliptical ultrasonic assisted grinding (EUAG) is considered a promising technique for difficult-to-machine material grinding. However, it has yet to be fully developed because the topography generation mechanism of a workpiece surface evolved using EUAG has not been elaborately addressed. Compared with other conventional grinding parameters, the ultrasonic vibration parameters (amplitude and frequency) during EUAG are the most critical factors in the generation of the surface topography. However, it is difficult to tune such parameters freely during an experiment, owing to the technical restrictions of current ultrasonic vibrators. Further, a pass-by-pass analysis of the surface material removal process is not possible to achieve during an experiment. Thus, a 3D ground surface topography generation method is developed in this study, and the surface generation process of four typical ground surfaces are analysed based on the calculated results. The four typical ground surfaces are then machined on the monocrystal silicon workpieces. The experimental results agree well with the surface topography predictions, which validates the effectiveness of the topography model. The material removal mechanism under different ultrasonic vibration parameters during EUAG is explained in this study according to the simulated abrasive cutting trajectory and ground surface. This method has shown its powerful ability to conduct a pass-by-pass analysis of the grinding process. Further, it can be used for a future investigation into the grinding vibration, cutting chips, and forces, and is not limited to EUAG, but is also applicable to other machining processes.

中文翻译：

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椭圆超声辅助磨削微表面形貌生成机理建模与分析

摘要 椭圆超声辅助磨削（EUAG）被认为是一种很有前途的难加工材料磨削技术。然而，由于使用 EUAG 进化的工件表面形貌生成机制尚未得到详细解决，因此尚未完全开发。与其他常规磨削参数相比，EUAG 过程中的超声振动参数（振幅和频率）是产生表面形貌的最关键因素。然而，由于当前超声波振动器的技术限制，在实验过程中很难自由调整这些参数。此外，在实验期间不可能实现对表面材料去除过程的旁通分析。因此，本研究开发了一种 3D 地表地形生成方法，并根据计算结果分析了四种典型地表的地表生成过程。然后在单晶硅工件上加工四个典型的磨削表面。实验结果与地表地形预测吻合较好，验证了地形模型的有效性。本研究根据模拟磨料切割轨迹和地表，解释了EUAG过程中不同超声振动参数下的材料去除机理。该方法显示了其对磨削过程进行旁通分析的强大能力。此外，它可以用于未来对磨削振动、切削屑和力的研究，不仅限于 EUAG，还适用于其他加工过程。