Abstract A new TOF-SIMS with high spatial and mass resolution has been constructed and applied to the in-situ micro-scale analysis of trace elements in geological materials with complex structural and chemical features. Double second-order reflectrons without mesh between different electric field regions of achieve greatly improved secondary ion transmission and mass resolution. The new TOF-SIMS can produce an O2- beam of ca. 5 μm diameter with a beam intensity of ca. 5 nA and a secondary ion mass resolution of more than 20,000 (FWHM). Functionality has been demonstrated by the analysis of Ti and rare earth elements in zircon.

中文翻译：

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用于分析地质材料中微量元素的 TOF-SIMS 的设计、构建和性能

摘要 构建了一种具有高空间分辨率和质量分辨率的新型TOF-SIMS，并将其应用于具有复杂结构和化学特征的地质材料中微量元素的原位微量分析。不同电场区域之间没有网格的双二阶反射器实现了二次离子传输和质量分辨率的大大提高。新的 TOF-SIMS 可以产生约 5 μm 直径，光束强度约 5 nA 和超过 20,000 (FWHM) 的次级离子质量分辨率。通过对锆石中的 Ti 和稀土元素进行分析，证明了其功能。