Laser‐Patterned Copper Electrodes for Proximity and Tactile Sensors,Advanced Materials Interfaces

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Laser‐Patterned Copper Electrodes for Proximity and Tactile Sensors
Advanced Materials Interfaces ( IF 4.3 ) Pub Date : 2020-01-01 , DOI: 10.1002/admi.201901845
Yuekang Li ₁ , Xingwen Zhou ₁ , Junliang Chen ₂ , Wei Guo ₁ , Shuo He ₁ , Shuo Gao _{2,

3} , Peng Peng _{1,

3}

Affiliation

Proximity and tactile sensors are important in human–machine interaction, which are usually fabricated with complex processes. In this study, a facile assembling method to fabricate these sensors on flexible substrate is presented. Using one‐step laser‐patterned highly conductive Cu electrodes on polyimide sheets and polydimethylsiloxane dielectric layer, single‐pixel proximity sensor with long detecting range and multichannel tactile sensor with high planar sensitivity are fabricated. Both sensors exhibit long term stability and repeatability throughout hundreds of testing cycles. This study highlights a rapid and low cost assembling for fabricating of capacitive sensors.

中文翻译：

用于接近和触觉传感器的激光图案化铜电极

接近传感器和触觉传感器在人机交互中很重要，人机交互通常是通过复杂的过程制造的。在这项研究中，提出了一种在柔性基板上制造这些传感器的简便组装方法。使用在聚酰亚胺片和聚二甲基硅氧烷介电层上的一步激光图案化的高导电性铜电极，可制造出具有长检测距离的单像素接近传感器和具有高平面灵敏度的多通道触觉传感器。两种传感器在数百个测试周期中均表现出长期的稳定性和可重复性。这项研究突出了用于电容传感器制造的快速且低成本的组装。

更新日期：2020-01-01

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