Abstract The impact of Pt or Co as alloying elements for Ni-based metallization of GeSn layers has been investigated. As far as the solid-state reaction is concerned, the overall phase sequence is the same for all metallizations: at low temperature, a Ni-rich phase is obtained; it is then consumed to form the low resistivity mono-stanogermanide phase. Nevertheless, the addition of an alloying element has an impact on Ni consumption, Ni-rich and mono-stanogermanide phases’ formation temperatures. Moreover, the addition of Co or Pt positively impacts Sn segregation by delaying this phenomenon. Co has a weak influence on morphological and electrical properties. On the other hand, Pt improves the surface morphology by delaying the Ni(GeSn) phase agglomeration and enhancing the process window in which the sheet resistance remains low.

中文翻译：

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合金元素（Co、Pt）对镍锡锗化物形成的影响

摘要 研究了 Pt 或 Co 作为合金元素对 GeSn 层的 Ni 基金属化的影响。就固态反应而言，所有金属化的整体相序是相同的：在低温下，获得富镍相；然后将其消耗以形成低电阻率的单锡锗化物相。然而，合金元素的添加对镍消耗、富镍相和单锡锗化物相的形成温度有影响。此外，添加 Co 或 Pt 通过延迟这种现象对 Sn 偏析产生积极影响。Co 对形态和电学性质的影响很小。另一方面，Pt 通过延迟 Ni(GeSn) 相团聚和增强工艺窗口来改善表面形貌，其中薄层电阻保持低。