Abstract Introducing a reflective deformable mirror into an existing optical system for aberration correction requires a folded optical path and relay optics, increasing of the bulk and cost. This paper proposes a low-cost deformable lens (DL) that can be easily integrated into the existing system for correction of low-order aberrations. It is formed by a transparent medium layer sandwiched between a thick glass plate and a piezo-actuated thin glass plate with a transparent area in the middle. The thin glass plate presses the underlying transparent medium to produce optical path difference for correcting the aberrations of the transmitted light. The fabricated DL prototype accurately reproduced the first 9 Zernike mode shapes. Furthermore, the DL was integrated into a customized microscopy imaging system to correct the aberrations, significantly improving the quality of microscopic images.

中文翻译：

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用于校正低阶像差的低成本可变形透镜

摘要 在现有的像差校正光学系统中引入反射式可变形镜需要折叠光路和中继光学器件，增加了体积和成本。本文提出了一种低成本的可变形透镜 (DL)，它可以很容易地集成到现有系统中，用于校正低阶像差。它由夹在厚玻璃板和压电驱动薄玻璃板之间的透明介质层形成，中间有透明区域。薄玻璃板压在下面的透明介质上，产生光程差，用于校正透射光的像差。制造的 DL 原型准确地再现了前 9 个泽尼克振型。此外，DL 被集成到定制的显微成像系统中以校正像差，