The additions of C₂H₂, CH₄ and H₂ in hybrid PVD-PECVD of W-C:H coatings deposited using High Power Impulse Magnetron Sputtering (HiPIMS) and High Target Utilization Sputtering (HiTUS) were investigated to determine their effects on the content and chemical composition of the amorphous carbon-based boundary phase and mechanical properties of the coatings. Substantial differences were observed: CH₄ always produced higher concentrations of hydrogen and lower concentrations of carbon than C₂H₂ and HiPIMS resulted in higher contents of amorphous carbon-based boundary phase and higher levels of its hydrogenation than HiTUS. The detrimental effects of higher carbon and hydrogen contents in the boundary phase on hardness and indentation modulus were attributed to the consumption of CC bonds by CH bonds during hydrogenation and reduction of cross-linking of the polymeric network in the boundary phase. The HiPIMS W-C:H coatings deposited with acetylene and hydrogen exhibited medium (∼20 GPa) hardness and elastic modulus (200–220 GPa) with H_IT/E_IT > 0.1 suggesting improved toughness and wear resistance. These properties were attributed to the optimum combination of hydrogenation, hybridization and cross linking in the carbon-based boundary phase.

研究了使用高功率脉冲磁控溅射（HiPIMS）和高目标利用溅射（HiTUS）沉积的WC：H涂层的混合PVD-PECVD中C ₂ H ₂，CH ₄和H _2的添加，以确定它们对含量的影响非晶碳基边界相的化学组成和涂层的机械性能。观察到明显的差异：与C ₂ H ₂相比，CH ₄总是产生更高的氢浓度和更低的碳浓度。和HiPIMS相比，HiTUS导致非晶碳基界面相的含量更高，并且其氢化程度更高。边界相中较高的碳和氢含量对硬度和压痕模量的不利影响归因于氢化过程中C H键消耗C C键，以及边界相中聚合物网络的交联减少。沉积有乙炔和氢气的HiPIMS WC：H涂层具有H _IT / E _IT中等硬度（〜20 GPa）和弹性模量（200–220 GPa）> 0.1表示韧性和耐磨性得到改善。这些性质归因于在基于碳的边界相中氢化，杂交和交联的最佳组合。