As transistors are reaching their fundamental limits in terms of power consumption, miniaturization, and heat generation, there is an imminent need to develop alternate computing technologies. One such an alternative is through micro/nanoelectromechanical systems (M/NEMS) that focuses on ultra-low energy consumption. Computing based on static MEMS switches has been proposed, however these suffer from reliability issues due to contact and stiction. Recently, logic devices based on electro mechanically excited vibrating structures, resonators, have emerged as a potential solution that overcomes these issues. This paper reviews the recent advancements of resonator-based M/NEMS logic devices. First, pioneering works in the field are surveyed. Then, logic devices based on frequency tuning are discussed. Next, cascadability of such logic devices is demonstrated. Finally, a discussion about the challenges of such technology and future prospects is presented.

随着晶体管在功耗，小型化和发热方面达到其基本极限，迫切需要开发替代计算技术。一种这样的替代方法是通过专注于超低能耗的微/纳米机电系统（M / NEMS）。已经提出了基于静态MEMS开关的计算，但是由于接触和静摩擦，这些开关存在可靠性问题。近来，基于机电激励的振动结构的逻辑器件，谐振器已经成为克服这些问题的潜在解决方案。本文回顾了基于谐振器的M / NEMS逻辑器件的最新进展。首先，对这一领域的开拓性作品进行了调查。然后，讨论了基于频率调谐的逻辑器件。下一个，演示了这种逻辑设备的级联性。最后，讨论了这种技术的挑战和未来前景。