In this study, a new method is established for indexing electron backscatter diffraction (EBSD) patterns assisted by the Kikuchi bandwidth. This method utilises both interplanar angles and interplanar spacings to determine the Miller indices of the Kikuchi bands in EBSD patterns to improve the efficiency and precision of indexing in the EBSD system. Two samples of single‐crystal silicon were investigated to validate the method based on (a) the detection of the edges of the EBSD Kikuchi bands and (b) the calculation of the Kikuchi bandwidths. The relationship between the Kikuchi bandwidth and the interplanar spacing at different positions was established, and the interplanar spacing of the corresponding lattice plane of each Kikuchi band was calculated with the use of the Kikuchi bandwidth information. The relative errors between the theoretical and experimental interplanar spacings are small, with an average relative error of 2.6% and a minimum relative error of 1.04%. The results indicated that the Miller index of each Kikuchi band can be determined accurately with this new method. It is demonstrated that use of this new method improves the efficiency and accuracy of the EBSD system.

中文翻译：

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菊池带宽辅助电子背散射衍射花样索引方法研究

在这项研究中，建立了一种新的方法来索引由菊池带宽辅助的电子背散射衍射 (EBSD) 图案。该方法利用晶面角和晶面间距来确定 EBSD 图案中菊池带的米勒指数，以提高 EBSD 系统中索引的效率和精度。研究了两个单晶硅样品以验证基于 (a) EBSD 菊池带边缘检测和 (b) 菊池带宽计算的方法。建立了菊池带宽与不同位置的晶面间距的关系，并利用菊池带宽信息计算了每个菊池波段对应晶面的晶面间距。理论与实验面间距的相对误差较小，平均相对误差为2.6%，最小相对误差为1.04%。结果表明，这种新方法可以准确地确定每个菊池波段的米勒指数。结果表明，使用这种新方法提高了 EBSD 系统的效率和准确性。