We demonstrate a chip-scale germanium-silicon optical phased array (OPA) fabricated on a CMOS-compatible platform capable of 2D beam steering in the mid-infrared wavelength range. The OPA included a specially designed grating emitter waveguide array with uniform emission intensity along the mm-length waveguide propagation to realize very sharp instantaneous field-of-view (IFOV) and wide beam-steering total-field-of-view (TFOV). The experimental results indicated lateral beam-steering TFOV up to 12.7° by phase-tuning the waveguide array and longitudinal TFOV up to 12° by wavelength tuning. The 3-dB beam divergence is 3.08° × 0.18°. The demonstrated OPA architecture can employ wafer-scale fabrication and integration while supporting sensing and imaging applications in the mid-infrared spectral range.

中文翻译：

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在锗硅光子平台上使用光学相控阵的固态中波光束控制

我们展示了在 CMOS 兼容平台上制造的芯片级锗硅光学相控阵 (OPA)，该平台能够在中红外波长范围内进行二维光束控制。OPA 包括一个专门设计的光栅发射器波导阵列，其沿毫米长的波导传播具有均匀的发射强度，以实现非常锐利的瞬时视场 (IFOV) 和宽光束控制总视场 (TFOV)。实验结果表明，通过对波导阵列进行相位调谐，横向光束转向 TFOV 高达 12.7°，通过波长调谐，纵向 TFOV 高达 12°。3-dB 波束发散角为 3.08° × 0.18°。演示的 OPA 架构可以采用晶圆级制造和集成，同时支持中红外光谱范围内的传感和成像应用。