Abstract In this paper, the structural, optical, and electrical properties of titanium suboxides (TiOx) are investigated. The sub-stoichiometric films were obtained by grid-assisted magnetron sputtering in an atmosphere of Ar and O2 at different oxygen concentrations in gas flow rate. The samples were characterized by profilometry, X-ray diffraction, and X-ray photoelectron spectroscopy. The optical and electrical properties were measured by optical spectrophotometry and the van der Pauw method, respectively. Oxygen deficiency (x

中文翻译：

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通过反应性网格辅助磁控溅射生长的钛氧化物的光学和电气特性

摘要 本文研究了低价钛 (TiOx) 的结构、光学和电学性质。亚化学计量薄膜是通过在不同氧气浓度的气体流速下在 Ar 和 O2 气氛中通过栅极辅助磁控溅射获得的。通过轮廓测定法、X 射线衍射和 X 射线光电子能谱对样品进行表征。分别通过分光光度法和范德堡法测量光学和电学性质。缺氧 (x