Abstract Hydrogenated amorphous carbon (a-C:H) films comprise nanoclustering graphites (nc-G), fused aromatic rings (nR), and olefinic chain clusters (nC) of sp2-bonded carbons in an sp3 matrix. In this study, the sp2 composition of the nc-G, nR and nC in a-C:H films is found to be determined by the ion bombardment energy flux (ΓEi), which can be estimated as the product of ion bombardment energy and ion flux onto the deposited surface, in plasma-enhanced chemical vapor deposition using a plasma mixture of H2 and CH4 gases with the H radical injection method. The sp2 composition is analyzed using Raman spectroscopy and near-edge X-ray absorption structure spectroscopy. a-C:H becomes increasingly graphitized with increasing ΓEi. The precise control of the sp2 C structure composition can be achieved by controlling the very-high-frequency input power and radio frequency input bias power via the ion flux and ion bombardment energy.

中文翻译：

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氢化非晶碳薄膜的气相和薄膜分析：离子轰击能量通量对 sp2 碳结构的影响

摘要 氢化无定形碳 (aC:H) 薄膜由 sp3 基体中 sp2 键合碳的纳米团簇石墨 (nc-G)、稠合芳环 (nR) 和烯烃链簇 (nC) 组成。在这项研究中，发现 aC:H 薄膜中 nc-G、nR 和 nC 的 sp2 组成由离子轰击能量通量 (ΓEi) 决定，它可以估计为离子轰击能量和离子通量的乘积在等离子体增强化学气相沉积中，使用 H2 和 CH4 气体的等离子体混合物和 H 自由基注入方法沉积到沉积表面上。使用拉曼光谱和近边 X 射线吸收结构光谱分析 sp2 组成。随着ΓEi 的增加，aC:H 变得越来越石墨化。