Abstract A dual-channel interferometer (DCI) is proposed for vibration-resistant optical measurement. The DCI employs a dual-channel interference optical path design, wherein an assistant channel is used to generate dense fringe patterns by introducing a spatial carrier frequency, and the coefficients of the vibration tilt phase plane are then extracted. The sparse fringe patterns of the main channel are combined with the coefficients of the tilt phase plane to calculate the measured phase distribution. This study reports the optical path and principles of the interference system. Simulations are performed using the proposed DCI phase extraction algorithm. To verify the DCI performance, phase measurements are carried out in a vibrating environment, and the results obtained using the proposed method are compared with those obtained using spatial phase-shifting interferometry (SPSI). The experimental results demonstrate that the DCI can effectively overcome the effect of vibration. Unlike spatial carrier frequency interferometry, although the spatial carrier frequency is also introduced in the assistant channel in the proposed DCI method, the dual-channel information extraction algorithm helps eliminate the calibration process of the retrace error before measurement, making this a calibration-free measurement. Moreover, the DCI utilizes environmental vibration to generate a ‘phase shift’, thus not only eliminating the need for a vibration isolation platform but also the need for a precise phase shifting device, with advantages such as structural simplicity, ease of operation, and low cost.

中文翻译：

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用于抗振光学测量的双通道干涉仪

摘要 提出了一种用于抗振光学测量的双通道干涉仪(DCI)。DCI采用双通道干涉光路设计，利用辅助通道通过引入空间载频产生密集条纹图案，然后提取振动倾斜相平面的系数。主通道的稀疏条纹图案与倾斜相平面的系数相结合，计算出测得的相位分布。本研究报告了干涉系统的光路和原理。使用建议的 DCI 相位提取算法进行模拟。为了验证 DCI 性能，在振动环境中进行相位测量，并将使用所提出的方法获得的结果与使用空间相移干涉测量法 (SPSI) 获得的结果进行比较。实验结果表明，DCI 可以有效地克服振动的影响。与空间载频干涉测量不同，虽然在所提出的DCI方法中在辅助通道中也引入了空间载频，但双通道信息提取算法有助于消除测量前回扫误差的校准过程，使其成为免校准测量. 并且，DCI利用环境振动产生“移相”，不仅不需要隔振平台，而且不需要精密的移相装置，具有结构简单、操作方便、成本低等优点。成本。