The paper presents the results of theoretical analysis and numerical modeling of physical processes occurring in microwave discharge supported in two intersecting wave beams in H 2 –CH 4 gas mixture. The transformation rules are defined that allow transferring the results of self-consistent solution of system of equations describing the state of microwave discharge for selected parameters (gas pressure, microwave radiation power and frequency, reactor and wave beams geometry) to other parameters. The following parameters ranges are considered: the medium gas pressure range (100–600 Torr), the radiation power from 1 to 30 kW and radiation frequencies from 10 to 60 GHz. The results of numerical simulation confirm the proposed approach and allow comparing the energy efficiency of the systems in terms of their practical application. The optimal parameters for diamond deposition in the considered plasma-chemical reactor in given range are discussed. The limits of applicability of the microwave discharge model and the proposed transformation rules are discussed.

中文翻译：

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10 至 60 GHz 频率范围内交叉微波束中等离子体层的维护：分析和模拟

本文介绍了在 H 2 -CH 4 气体混合物中由两个交叉波束支持的微波放电中发生的物理过程的理论分析和数值模拟结果。定义的转换规则允许将描述选定参数（气体压力、微波辐射功率和频率、反应器和波束几何形状）的微波放电状态的方程组的自洽解的结果转换为其他参数。考虑了以下参数范围：中等气压范围（100-600 Torr），辐射功率从 1 到 30 kW，辐射频率从 10 到 60 GHz。数值模拟的结果证实了所提出的方法，并允许在实际应用方面比较系统的能源效率。讨论了给定范围内所考虑的等离子体化学反应器中金刚石沉积的最佳参数。讨论了微波放电模型的适用范围和建议的转换规则。