Abstract This paper describes an innovative electro-acoustic coupling structure with a Patterned Piezoelectric film as Inter-Digital Transducer (PP-IDT) on the diamond substrate for Surface Acoustic Wave (SAW) devices of better quality factor and frequency resolution. Theoretical analysis and Finite Element Method (FEM) are employed to investigate the dependence of microwave impedance characters on the thickness of piezoelectric and metal electrode layers. The systematic studies show that the PP-IDT structure can excite the mechanical vibration on the top surface of diamond substrate and derive the SAW. The quality factor increases remarkably in excess to 104 since the SAW is propagating below the diamond surface with little interface loss and transmission loss.

中文翻译：

---

金刚石基板上作为IDT的压电薄膜的有限元分析，以提高SAW器件的品质因数

摘要 本文描述了一种创新的电声耦合结构，在金刚石基板上使用图案化压电薄膜作为数字间换能器 (PP-IDT)，用于具有更好品质因数和频率分辨率的表面声波 (SAW) 设备。采用理论分析和有限元方法 (FEM) 来研究微波阻抗特性对压电和金属电极层厚度的依赖性。系统研究表明，PP-IDT结构可以激发金刚石基体上表面的机械振动并产生SAW。品质因数显着增加到 104 以上，因为 SAW 在金刚石表面下方传播，几乎没有界面损耗和传输损耗。