An approach for producing ultrahigh spatial resolution selected area electron channeling patterns (UHR-SACPs) using the FEI/Thermo Elstar electron column is presented. The approach uses free lens control to directly assign lens and deflector values to rock the beam about precise points on the sample surface and generate the UHR-SACPs. Modification of the lens parameters is done using a service application that is preinstalled on the microscope or using the iFast scripting interface to run a short program to assign lens and deflector currents. Using the approach outlined here, the UHR-SACPs are collected at normal instrument scanning rates and pixel densities, resulting in rapid collection times and sharp patterns with simple push button changes in instrument mode. UHR-SACPs with spatial resolutions of 300 nm with angular ranges of 20° are demonstrated, as are patterns approaching 125 nm spatial resolution with angular ranges of 4°. Such spatial resolution/angular range combinations are significantly better than any reported previously. This approach for rapidly collecting high accuracy crystallographic information greatly enhances the ability to carry out electron channeling contrast imaging (ECCI) for a broad range of materials applications.

中文翻译：

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超高空间分辨率选定区域电子通道模式

介绍了一种使用 FEI/Thermo Elstar 电子柱生成超高空间分辨率选区电子沟道模式 (UHR-SACP) 的方法。该方法使用自由镜头控制直接分配镜头和偏转器值，以围绕样品表面上的精确点摇动光束并生成 UHR-SACP。使用预装在显微镜上的服务应用程序或使用 iFast 脚本界面运行一个短程序来分配镜头和偏转器电流，即可修改镜头参数。使用此处概述的方法，以正常的仪器扫描速率和像素密度收集 UHR-SACP，从而通过在仪器模式下简单地更改按钮来缩短收集时间和清晰的图案。展示了具有 300 nm 空间分辨率和 20° 角度范围的 UHR-SACP，以及接近 125 nm 空间分辨率和 4° 角度范围的图案。这种空间分辨率/角度范围组合明显优于之前报道的任何组合。这种快速收集高精度晶体学信息的方法极大地增强了为广泛的材料应用进行电子通道对比成像 (ECCI) 的能力。