Abstract Microstructured surfaces over large areas are typical in diffractive optics and biomimetic surfaces. The topography measurement is challenging due to the multi-scale nature. In this paper, an efficient stitching method is proposed for fusion of multiple subapertures to produce a large area topography. The first step is detecting edge features and then projecting them on the OXY plane. The next step is correction of lateral coordinates by registering the edge curves in overlapping regions. The change of lateral coordinates is linearly related to the lateral shifts and clocking angle which are estimated by simply solving a linear least-squares problem. In the final step, height change is also linearly related to the piston and tip-tilt of subapertures. Hence it is corrected by minimizing the height difference in overlapping regions, which is again modeled as a linear least-squares problem. The stitching method is experimentally verified on a holographic sample. Totally seven by seven subapertures are measured with an interference microscope and seamlessly stitched together.

中文翻译：

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用于测量大面积微结构形貌的高效子孔径拼接方法

摘要 大面积的微结构表面是衍射光学和仿生表面的典型特征。由于多尺度性质，地形测量具有挑战性。在本文中，提出了一种用于融合多个子孔径以产生大面积地形的有效拼接方法。第一步是检测边缘特征，然后将它们投影到 OXY 平面上。下一步是通过在重叠区域配准边缘曲线来校正横向坐标。横向坐标的变化与横向位移和时钟角线性相关，通过简单地求解线性最小二乘问题来估计。在最后一步，高度变化也与活塞和子孔径的倾斜度呈线性关系。因此通过最小化重叠区域的高度差来校正，这再次被建模为线性最小二乘问题。拼接方法在全息样本上进行了实验验证。总共七乘七子孔径用干涉显微镜测量并无缝拼接在一起。