Abstract Using TaCl5 as the precursor, two types of Ta2O5 sols were synthesized with employment of different dual additives, namely, diethanolamine (DEA) with acetylacetone and DEA with polyethylene glycol (PEG). The prepared sol-gel Ta2O5 films were featured by the low surface roughness, high transmittance, low absorption and high laser-induced damage threshold (LIDT). The highest LIDT of 29.1 J/cm2 was obtained in the film prepared with the DEA and PEG additives. This should be attributed to the chelation effect of DEA and the steric hindrance imposed by PEG, which synergistically resulted in a more regular three-dimensional network structure and consequently lower film internal defects. In the case of temperature increase to 150 °C, the LIDT levels of both the films decreased. The damage morphologies indicated the defect-induced mechanism for the films irradiated either at the room temperature, or at the high temperature of 150 °C. Moreover, an evolution model was proposed to reveal the effect of dual additives on the structure of Ta2O5 films. This study was conducive to a better understanding of the fundamental laser damage mechanism and exploring the potential application of sol-gel films in high temperature environment.

中文翻译：

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不同双添加剂对溶胶-凝胶 Ta2O5 薄膜的原位高温激光损伤

摘要 以TaCl5为前驱体，采用不同的双添加剂合成了两种类型的Ta2O5溶胶，即二乙醇胺(DEA)与乙酰丙酮和DEA与聚乙二醇(PEG)。制备的溶胶-凝胶 Ta2O5 薄膜具有低表面粗糙度、高透射率、低吸收率和高激光诱导损伤阈值 (LIDT) 的特点。在用 DEA 和 PEG 添加剂制备的薄膜中获得了 29.1 J/cm2 的最高 LIDT。这应该归因于 DEA 的螯合效应和 PEG 施加的空间位阻，它们协同导致更规则的三维网络结构，从而降低了膜内部缺陷。在温度升高到 150 °C 的情况下，两种薄膜的 LIDT 水平都降低了。损伤形态表明薄膜在室温或 150°C 高温下辐照的缺陷诱导机制。此外，提出了一种演化模型来揭示双添加剂对 Ta2O5 薄膜结构的影响。该研究有助于更好地理解基本的激光损伤机制，探索溶胶-凝胶薄膜在高温环境中的潜在应用。