In magnetized capacitively coupled radio frequency (RF) plasmas operated at low pressure, the Magnetic Asymmetry Effect (MAE) provides the opportunity to control the discharge symmetry, the DC self-bias, and the ion energy distribution functions at boundary surfaces by adjusting a magnetic field, that is oriented parallel to the electrodes, at one electrode, while leaving it constant at the opposite electrode. This effect is caused by the presence of different plasma densities in regions of different magnetic field strength. Here, based on a balanced magnetron magnetic field configuration at the powered electrode, we demonstrate that the magnetic control of the plasma symmetry allows to tailor the generation of high frequency oscillations in the discharge current induced by the self-excitation of the Plasma Series Resonance (PSR) through adjusting the magnetic field adjacent to the powered electrode. Experimental current measurements performed in an argon discharge at 1 Pa as well as results of an equivalent circuit model show that Non-Linear Electron Resonance Heating (NERH) can be switched on and off in this way. Moreover, the self-excitation of the PSR can be shifted in time (within the RF period) and in space (from one electrode to the other) by controlling the discharge symmetry via adjusting the magnetic field.

中文翻译：

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电容耦合射频放电中非线性电子共振加热的磁控制

在低压操作的磁化电容耦合射频 (RF) 等离子体中，磁不对称效应 (MAE) 提供了通过调节磁场来控制放电对称性、直流自偏置和边界表面处的离子能量分布函数的机会。场，即平行于电极，在一个电极上，而在相反的电极上保持恒定。这种效应是由不同磁场强度区域中不同等离子体密度的存在引起的。在此，基于通电电极处的平衡磁控管磁场配置，我们证明了等离子体对称性的磁控制允许通过调整与通电电极相邻的磁场来定制由等离子体串联谐振 (PSR) 的自激引起的放电电流中高频振荡的产生。在 1 Pa 氩气放电中进行的实验电流测量以及等效电路模型的结果表明，非线性电子共振加热 (NERH) 可以通过这种方式打开和关闭。此外，通过调节磁场来控制放电对称性，PSR 的自激可以在时间（在 RF 周期内）和空间（从一个电极到另一个电极）移动。在 1 Pa 氩气放电中进行的实验电流测量以及等效电路模型的结果表明，非线性电子共振加热 (NERH) 可以通过这种方式打开和关闭。此外，通过调节磁场来控制放电对称性，PSR 的自激可以在时间（在 RF 周期内）和空间（从一个电极到另一个电极）移动。在 1 Pa 氩气放电中进行的实验电流测量以及等效电路模型的结果表明，非线性电子共振加热 (NERH) 可以通过这种方式打开和关闭。此外，通过调节磁场来控制放电对称性，PSR 的自激可以在时间（在 RF 周期内）和空间（从一个电极到另一个电极）移动。