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Spatio-temporally resolved investigations of layered particle growth in a reactive argon-acetylene plasma
Plasma Sources Science and Technology ( IF 3.3 ) Pub Date : 2019-11-28 , DOI: 10.1088/1361-6595/ab5412
Sebastian Groth , Franko Greiner , Alexander Piel

The growth of nanometer-sized particle populations is studied in a reactive argon-acetylene plasma. Particular attention is paid to the spatio-temporal evolution of nested particle populations. For this purpose, a new non-invasive 2D imaging ellipsometry diagnostic is applied in combination with laser extinction measurements. In this way, the spatio-temporal evolution of particle size and density is obtained. The temporal evolution of the particle clouds during the first and subsequent growth cycles reveals a complex interplay between the different particle generations, the plasma and the resulting dust confinement. It is demonstrated that the electrostatic pressure needs to be considered in the force balance of systems with high dust densities. The relationship between the growth of particles and characteristic transition events visible in the dynamic of the void is discussed.

中文翻译:

反应性氩-乙炔等离子体中层状粒子生长的时空分辨研究

在反应性氩-乙炔等离子体中研究了纳米级粒子群的生长。特别注意嵌套粒子群的时空演化。为此,结合激光消光测量应用了一种新的非侵入式二维成像椭偏仪诊断。通过这种方式,获得了粒度和密度的时空演变。在第一个和随后的生长周期中粒子云的时间演变揭示了不同粒子生成、等离子体和由此产生的尘埃限制之间的复杂相互作用。结果表明,在高粉尘密度系统的力平衡中需要考虑静电压力。
更新日期:2019-11-28
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