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Characterization of CO 2 microwave plasma based on the phenomenon of skin-depth-limited contraction
Plasma Sources Science and Technology ( IF 4.128 ) Pub Date : 2019-11-28 , DOI: 10.1088/1361-6595/ab4e61
A J Wolf, T W H Righart, F J J Peeters, P W C Groen, M C M van de Sanden and W A Bongers

The subatmospheric CO 2 microwave plasma is known to contract to a narrow filament with rising pressure as result of a mode transition. This changing state of contraction is investigated in relation to its dielectric properties, in order to directly relate the discharge parameters to the discharge radius. The electron density and gas temperature are measured, respectively, by 168 GHz microwave interferometry and Doppler broadening of the 777 nm oxygen emission lines. The plasma is operated in steady state with 1400 W at 2.45 GHz, between 100 mbar and 400 mbar. Electron density values in the central region range from 10 18 to 10 20 m −3 between the discharge modes, while the gas temperature increases from 3000 K to 6500 K, in good agreement with previously reported values. Based on the dielectric properties of the discharge in relation to the plasma radius, it is found that the discharge column constitutes a radius of a single skin depth. I...
更新日期:2019-11-29

 

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