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Time-resolved optical emission spectroscopy of a unipolar and a bipolar pulsed magnetron sputtering discharge in an argon/oxygen gas mixture with a cobalt target
Plasma Sources Science and Technology ( IF 4.128 ) Pub Date : 2019-11-28 , DOI: 10.1088/1361-6595/ab54e8
R Hippler, M Cada, V Stranak and Z Hubicka

Reactive high power impulse magnetron sputtering (HiPIMS) of a cobalt cathode in pure argon gas and with different oxygen admixtures was investigated by time-resolved optical emission spectroscopy (OES) and time-integrated energy-resolved mass spectrometry. The HiPIMS discharge was operated with a bipolar pulsed power supply capable of providing a large negative voltage with a typical pulse width of 100 μ s followed by a long positive pulse with a pulse width of about 350 μ s. The HiPIMS plasma in pure argon is dominated by Co + ions. With the addition of oxygen, O + ions become the second most prominent positive ion species. OES reveals the presence of Ar I, Co I, O I, and Ar II emission lines. The transition from an Ar + to a Co + ion sputtering discharge is inferred from time-resolved OES. The enhanced intensity of excited Ar +* ions is explained by simultaneous excitation and ionisation induced by energetic second...
更新日期:2019-11-29

 

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