For this research, we have developed key technologies for a 1.5 µm pixel pitch spatial light modulator (SLM) using Ge2Sb2Te5 (GST) phase change material. To uniformly modulate each pixel, we designed a lateral pixel structure in which a heating current flows through a bottom indium tin oxide layer. To check hologram reconstruction both after multilevel fabrication processes and before implementing full source and driver circuits, we fabricated an 8K×2K hologram on the topology by changing the GST film's phase using laser irradiation. To overcome the limitation of SLM size, we tested a physical tiling structure and found that flatness of tiled SLMs was the most important factor in the realization of holographic displays.

中文翻译：

---

使用Ge2Sb2Te5相变材料制作1.5 µm像素间距的空间光调制器[已邀请]。

对于这项研究，我们已经开发了使用Ge2Sb2Te5（GST）相变材料的1.5 µm像素间距空间光调制器（SLM）的关键技术。为了均匀地调制每个像素，我们设计了一个横向像素结构，其中加热电流流经底部铟锡氧化物层。为了检查多层制造工艺之后以及实现完整的源极和驱动器电路之前的全息图重构，我们通过使用激光照射改变GST膜的相位，在拓扑上制作了8K×2K全息图。为了克服SLM尺寸的限制，我们测试了物理切片结构，并发现平铺SLM的平面度是实现全息显示的最重要因素。