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Effects of Pulse Power and Argon Flux Flow Rate on Mechanical and Tribological Properties of Diamond-like Carbon Coatings Prepared Using High Power Impulse Magnetron Sputtering Technology
Thin Solid Films ( IF 2.0 ) Pub Date : 2020-01-01 , DOI: 10.1016/j.tsf.2019.137712
W.H. Kao , Y.L. Su , J.H. Horng , C.C. Yu

Abstract Diamond-like carbon (DLC) coatings were deposited on SKH51 disks using a high power impulse magnetron sputtering (HiPIMS) system. Preliminary experiments were performed to determine the HiPIMS conditions which maximized the DLC coating hardness. The composition, structure, mechanical and tribological properties of the DLC coatings were then systematically explored for different values of the HiPIMS pulse power and argon flux flow rate. For given values of the HiPIMS deposition time, pulse current and deposition distance, a high DLC coating nanohardness (19.77 GPa) was obtained using a pulse power of 5 kW and an argon flux flow rate of 100 sccm. However, the coating exhibited the lowest adhesive strength (i.e., a critical load (Lc) of just 6 N). By contrast, the coating prepared with a pulse power of 5 kW and an argon flux flow rate of 80 sccm had the highest nanohardness (22.88 GPa) and a greatly improved adhesive performance (Lc = 73 N). However, it showed the lowest wear rate among all of the coatings when sliding against an Al2O3 ball under loads of 6–14 N. The coating deposited with a pulse power of 4 kW and an argon flux flow rate of 100 sccm possessed the highest critical load of all the coatings (Lc = 94 N), and thus exhibited the longest wear life when sliding against the Al2O3 ball (∼129,756 cycles). When sliding against an AISI 52100 ball, all of the coatings showed an excellent tribological performance, including a low wear rate and a long wear life (more than 150,000 cycles).

中文翻译:

脉冲功率和氩气流量对高功率脉冲磁控溅射技术制备类金刚石碳涂层机械和摩擦学性能的影响

摘要 使用高功率脉冲磁控溅射 (HiPIMS) 系统在 SKH51 磁盘上沉积类金刚石 (DLC) 涂层。进行初步实验以确定使 DLC 涂层硬度最大化的 HiPIMS 条件。然后针对不同的 HiPIMS 脉冲功率值和氩气流量,系统地研究了 DLC 涂层的成分、结构、机械和摩擦学性能。对于给定的 HiPIMS 沉积时间、脉冲电流和沉积距离值,使用 5 kW 的脉冲功率和 100 sccm 的氩通量流量获得了高 DLC 涂层纳米硬度 (19.77 GPa)。然而,涂层表现出最低的粘合强度(即临界载荷 (Lc) 仅为 6 N)。相比之下,以5 kW的脉冲功率和80 sccm的氩气流量制备的涂层具有最高的纳米硬度(22.88 GPa)和大大提高的粘合性能(Lc = 73 N)。然而,当在 6-14 N 的负载下与 Al2O3 球滑动时,它显示出所有涂层中最低的磨损率。 以 4 kW 的脉冲功率和 100 sccm 的氩气流量沉积的涂层具有最高的临界值所有涂层的负载(Lc = 94 N),因此在与 Al2O3 球滑动时表现出最长的磨损寿命(~129,756 次循环)。当与 AISI 52100 球滑动时,所有涂层都显示出优异的摩擦学性能,包括低磨损率和长磨损寿命(超过 150,000 次循环)。当在 6-14 N 的负载下与 Al2O3 球滑动时,它显示出所有涂层中最低的磨损率。 以 4 kW 的脉冲功率和 100 sccm 的氩气流量沉积的涂层具有最高的临界负载所有涂层(Lc = 94 N),因此在与 Al2O3 球滑动时表现出最长的磨损寿命(~129,756 次循环)。当与 AISI 52100 球滑动时,所有涂层都显示出优异的摩擦学性能,包括低磨损率和长磨损寿命(超过 150,000 次循环)。在负载为 6-14 N 的情况下与 Al2O3 球滑动时,它显示出所有涂层中最低的磨损率。以 4 kW 的脉冲功率和 100 sccm 的氩气流量沉积的涂层具有最高的临界负载所有涂层(Lc = 94 N),因此在与 Al2O3 球滑动时表现出最长的磨损寿命(~129,756 次循环)。当与 AISI 52100 球滑动时,所有涂层都显示出优异的摩擦学性能,包括低磨损率和长磨损寿命(超过 150,000 次循环)。因此在与 Al2O3 球滑动时表现出最长的磨损寿命(~129,756 次循环)。当与 AISI 52100 球滑动时,所有涂层都显示出优异的摩擦学性能,包括低磨损率和长磨损寿命(超过 150,000 次循环)。因此在与 Al2O3 球滑动时表现出最长的磨损寿命(~129,756 次循环)。当与 AISI 52100 球滑动时,所有涂层都显示出优异的摩擦学性能,包括低磨损率和长磨损寿命(超过 150,000 次循环)。
更新日期:2020-01-01
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