Nowadays, micro-scale piezoelectric devices with high sensitivity are much in demand for transducer technologies. This work suggests a low cost technology consisting of a screen-printing process associated with a sacrificial layer for preparation of microceramic-disks. These printed microdisks are based on a PZT layer sandwiched between two printed electrodes. The printed microdisks can be released from substrates by co-firing, leading to a complete decomposition of the sacrificial layer. The effect of different electrode materials (Au and Ag/Pd) on the releasing behavior is described. Uniform releasing is obtained by Ag/Pd electrodes whereas Au electrodes perform partial sticking on the substrates. Furthermore, the printed microdisks made of different PZT particle sizes are compared in terms of microstructure, electromechanical, and dielectric properties. The dense microdisks obtained from nanometric PZT particles and Ag/Pd electrodes generate high values of effective electromechanical coupling coefficient (45%) and relative permittivity (1200). Therefore, these printed microdisks are considered to be potential candidates for different sensing and actuating applications.

如今，传感器技术对具有高灵敏度的微型压电器件的需求很大。这项工作提出了一种低成本的技术，该技术包括与用于制备微陶瓷盘的牺牲层相关的丝网印刷工艺。这些印刷微盘基于夹在两个印刷电极之间的PZT层。可以通过共点火从基板释放已打印的微型磁盘，从而导致牺牲层完全分解。描述了不同电极材料（Au和Ag / Pd）对释放行为的影响。Ag / Pd电极可实现均匀剥离，而Au电极可部分粘附在基板上。此外，比较了由不同PZT粒度制成的印刷微盘的微观结构，机电，和介电性能。由纳米级PZT颗粒和Ag / Pd电极获得的致密微盘可产生较高的有效机电耦合系数（45％）和相对介电常数（1200）。因此，这些印刷的微型磁盘被认为是不同感测和驱动应用的潜在候选者。