In this paper we present a metrological method for determination of mass density of focused ion beam induced deposition (FIBID) materials using quartz tuning fork (QTF) mass change sensors. Dimension and density determination of FIBID deposited nanostructures is necessary to develop and reliable and repeatable microfabribrication technology of the highest versatility. The proposed metrological methodology allows to determine mass change with 5 pg resolution and accuracy below 5 % if density is considered. The described method is suitable for precise FIBID precursor parameters determination conducted during the deposition as actuation and signal read-out of the applied QTF can be performed electrically. High accuracy, resolution and stability are ensured due to excellent properties of quartz forming the sensor structure.

在本文中，我们介绍了一种使用石英音叉（QTF）质量变化传感器确定聚焦离子束诱导沉积（FIBID）材料的质量密度的计量方法。FIBID沉积纳米结构的尺寸和密度测定对于开发具有最高通用性的可靠且可重复的微细加工技术是必不可少的。如果考虑密度，则所提出的计量学方法可确定5 pg分辨率的质量变化和低于5％的精度。所描述的方法适合于在沉积期间进行的精确的FIBID前体参数确定，因为可以电执行施加的QTF的致动和信号读出。由于形成传感器结构的石英的优异性能，确保了高精度，分辨率和稳定性。