Improvement of the Energy Resolution of Energy Dispersive Spectrometers (EDS) using Richardson-Lucy Deconvolution,Ultramicroscopy

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Improvement of the Energy Resolution of Energy Dispersive Spectrometers (EDS) using Richardson-Lucy Deconvolution
Ultramicroscopy ( IF 2.1 ) Pub Date : 2020-02-01 , DOI: 10.1016/j.ultramic.2019.112886
Nicolas Brodusch ₁ , Karim Zaghib ₂ , Raynald Gauvin ₁

Affiliation

A serious limitation in the use of energy dispersive spectrometers (EDS) for materials characterization arises from the fact that these x-ray detectors provide a poor energy resolution compared to other x-ray techniques. This is mainly due to the broadening function generated by the electronics of the detector. However, new windowless detectors are now capable of resolving low energy peaks like Li Kα with modified electronics and show a system peak full width at half maximum (FWHM) of around 30 eV. In this paper, we investigated how the Richardson-Lucy algorithm can be used to remove, or at least attenuate, the contribution of the broadening function to experimental spectra. This method proved to be efficient in improving the energy resolution at any energy in the EDS spectrum. The resulting system peak FWHM was reduced to as low as 7-8 eV and the separation of low energy x-ray peaks were demonstrated in the low energy range of the spectra. The method was also efficient in reducing the peak broadening at higher energies (Cu Kα) and the broadening function of the detector could be experimentally determined to provide higher accuracy in predicting peak broadening. Although some critical artefacts were noted on the restored spectra, like energy shifts and intensity variations, the method explored in this work is worth to be considered for further quantification tests.

中文翻译：

使用理查森-露西反卷积改进能量色散谱仪 (EDS) 的能量分辨率

使用能谱仪 (EDS) 进行材料表征的一个严重限制是由于这些 X 射线探测器与其他 X 射线技术相比提供较差的能量分辨率。这主要是由于检测器的电子器件产生的展宽函数。然而，新的无窗检测器现在能够使用改进的电子器件解析像 Li Kα 这样的低能量峰，并显示出大约 30 eV 的系统半峰全宽 (FWHM)。在本文中，我们研究了如何使用 Richardson-Lucy 算法来消除或至少减弱展宽函数对实验光谱的贡献。事实证明，该方法可有效提高 EDS 光谱中任何能量的能量分辨率。所得系统峰 FWHM 降低至 7-8 eV，并且在光谱的低能量范围内证明了低能量 X 射线峰的分离。该方法还可以有效减少较高能量 (Cu Kα) 下的峰展宽，并且可以通过实验确定检测器的展宽功能，以提供更高的预测峰展宽的准确性。尽管在恢复的光谱上注意到了一些关键的人工制品，如能量偏移和强度变化，但这项工作中探索的方法值得考虑用于进一步的量化测试。该方法还可以有效减少较高能量 (Cu Kα) 下的峰展宽，并且可以通过实验确定检测器的展宽功能，以提供更高的预测峰展宽的准确性。尽管在恢复的光谱上注意到了一些关键的人工制品，如能量偏移和强度变化，但这项工作中探索的方法值得考虑用于进一步的量化测试。该方法还可以有效减少较高能量 (Cu Kα) 下的峰展宽，并且可以通过实验确定检测器的展宽功能，以提供更高的预测峰展宽的准确性。尽管在恢复的光谱上注意到了一些关键的人工制品，如能量偏移和强度变化，但这项工作中探索的方法值得考虑用于进一步的量化测试。

更新日期：2020-02-01

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