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Adhesion‐Engineering‐Enabled “Sketch and Peel” Lithography for Aluminum Plasmonic Nanogaps
Advanced Optical Materials ( IF 8.0 ) Pub Date : 2019-11-06 , DOI: 10.1002/adom.201901202 Yiqin Chen 1 , Shi Zhang 1 , Zhiwen Shu 1 , Zhaolong Wang 1 , Peng Liu 1 , Chen Zhang 1 , Yasi Wang 1 , Qing Liu 1 , Huigao Duan 1 , Yanjun Liu 2
Advanced Optical Materials ( IF 8.0 ) Pub Date : 2019-11-06 , DOI: 10.1002/adom.201901202 Yiqin Chen 1 , Shi Zhang 1 , Zhiwen Shu 1 , Zhaolong Wang 1 , Peng Liu 1 , Chen Zhang 1 , Yasi Wang 1 , Qing Liu 1 , Huigao Duan 1 , Yanjun Liu 2
Affiliation
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Aluminum is one of the most significant plasmonic materials for its advantage of low cost, natural abundance, as well as the ultraviolet optical response. However, it is still very challengeable for the fabrication of aluminum plasmonic nanogaps, which greatly limits the applications of aluminum plasmonics considering the essential role of nanogaps for electric field enhancement. Here, the reliable patterning of aluminum plasmonic nanogaps employing a modified “Sketch and Peel” lithography strategy is demonstrated. By introducing a self‐assembled monolayer to engineer the surface energy of the substrate, the adhesiveness of the aluminum film outside outline template is significantly decreased to implement the selective peeling process. Besides, the near‐infrared Fano resonance in the periodic aluminum heptamers has been first revealed by enabling the strong electric field and plasmon coupling in the aluminum nanostructures with 10 nm scale nanogaps. In addition, surface‐enhanced Raman spectroscopy and infrared spectroscopy are also illustrated in the rationally designed aluminum dimers. The present work provides a robust method to obtain aluminum plasmonic nanogaps, which may play an important role on the practical applications of aluminum plasmonics, such as surface‐enhanced vibration spectroscopy and nonlinear optics.
中文翻译：
用于铝等离子纳米间隙的可进行粘合工程的“素描和剥离”光刻技术
铝是低成本，自然丰度以及紫外线光学响应的优势，是最重要的等离激元材料之一。然而，铝等离激元纳米间隙的制造仍然是非常具有挑战性的，考虑到纳米间隙对于增强电场的重要作用，这极大地限制了铝等离激元的应用。在此，展示了采用改进的“ Sketch and Peel”光刻技术对铝等离子体激元纳米间隙进行可靠的图案化的方法。通过引入自组装单层膜来控制基材的表面能，铝膜在轮廓模板外部的粘附性将大大降低，从而实现了选择性剥离工艺。除了，周期性铝七聚体中的近红外Fano共振首先通过在具有10 nm尺度纳米间隙的铝纳米结构中实现强电场和等离子体耦合来揭示。此外，在合理设计的铝二聚体中还说明了表面增强拉曼光谱和红外光谱。本工作为获得铝等离子体纳米间隙提供了一种可靠的方法，该方法可能在铝等离子体的实际应用中发挥重要作用，例如表面增强振动光谱法和非线性光学。
更新日期：2020-01-17
中文翻译：
用于铝等离子纳米间隙的可进行粘合工程的“素描和剥离”光刻技术
铝是低成本，自然丰度以及紫外线光学响应的优势，是最重要的等离激元材料之一。然而，铝等离激元纳米间隙的制造仍然是非常具有挑战性的，考虑到纳米间隙对于增强电场的重要作用，这极大地限制了铝等离激元的应用。在此，展示了采用改进的“ Sketch and Peel”光刻技术对铝等离子体激元纳米间隙进行可靠的图案化的方法。通过引入自组装单层膜来控制基材的表面能，铝膜在轮廓模板外部的粘附性将大大降低，从而实现了选择性剥离工艺。除了，周期性铝七聚体中的近红外Fano共振首先通过在具有10 nm尺度纳米间隙的铝纳米结构中实现强电场和等离子体耦合来揭示。此外，在合理设计的铝二聚体中还说明了表面增强拉曼光谱和红外光谱。本工作为获得铝等离子体纳米间隙提供了一种可靠的方法，该方法可能在铝等离子体的实际应用中发挥重要作用，例如表面增强振动光谱法和非线性光学。
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